Frontiers of Optoelectronics Pub Date : 2023-11-17 , DOI: 10.1007/s12200-023-00092-1 Peixun Fan 1 , Guochen Jiang 1 , Xinyu Hu 1 , Lizhong Wang 1 , Hongjun Zhang 1 , Minlin Zhong 1
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Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications. As a versatile approach, ultrafast laser ablation has been widely studied for surface micro/nano structuring. Increasing research efforts in this field have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures. In this paper, we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation. From an overview perspective, we firstly summarize the different roles that plasma plumes, from pulsed laser ablation of solids, play in different laser processing approaches. Then, the distinctive in-situ deposition process within surface micro/nano structuring is highlighted. Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures, through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase. The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches, adding a new dimension and more flexibility in controlling the fabrication of functional surface micro/nano structures.
Graphical Abstract
中文翻译：
局部原位沉积：通过超快激光烧蚀控制制造表面微/纳米结构的新维度
表面微/纳米结构的可控制造是实现各种应用表面功能化的关键。作为一种通用方法，超快激光烧蚀已被广泛研究用于表面微/纳米结构。该领域的研究工作不断增加，致力于更好地控制制造工艺，以满足日益增长的复杂结构创建需求。在本文中，我们重点研究超快激光烧蚀下等离子体形成后的原位沉积过程。从概述的角度来看，我们首先总结了固体脉冲激光烧蚀产生的等离子体羽流在不同激光加工方法中发挥的不同作用。然后，重点介绍了表面微/纳米结构中独特的原位沉积过程。我们的实验工作表明，超快激光表面结构化过程中的原位沉积可以作为局部微添加过程进行控制，以堆积二级有序结构，通过这种结构，可以在微结构顶部形成一种独特的带有堡垒状物体的分层结构。锥形阵列被制作成展示柜。所揭示的激光与物质相互作用机制可以启发新的超快激光制造方法的开发，为控制功能表面微/纳米结构的制造增加新的维度和更大的灵活性。
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