Abstract

The effect of the external discharge parameters on the electrophysical parameters and emission spectra of difluorodichloromethane plasma is analyzed. Data on the reduced electric field strength and gas temperature are obtained. It is established that the reduced electric field strength in difluorodichloromethane plasma decreases markedly with increasing gas pressure (at a constant discharge current). It is shown that a linear increase in the gas temperature with increasing pressure is due to the increase in the specific power deposited in the discharge. Atomic and molecular components are found in the emission spectra of the glow discharge of difluorodichloromethane. It is established that, with increasing current, a linear increase in the radiation intensity occurs, which corresponds to the mechanism of the direct excitation of the radiating states upon electron impact and indicates the absence of secondary processes.

中文翻译：

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二氟二氯甲烷辉光放电的电物理参数和发射光谱

摘要

分析了外部放电参数对二氟二氯甲烷等离子体电物理参数和发射光谱的影响。获得有关降低的电场强度和气体温度的数据。已确定，二氟二氯甲烷等离子体中的降低电场强度随着气压的增加（在恒定放电电流下）而显着降低。结果表明，气体温度随着压力的增加而线性增加，这是由于放电中沉积的比功率的增加。在二氟二氯甲烷辉光放电的发射光谱中发现了原子和分子成分。可以确定的是，随着电流的增加，辐射强度发生线性增加，这对应于电子撞击时直接激发辐射态的机制，并且表明不存在二次过程。