An ultra-small integrated CO2 infrared gas sensor for wearable end-tidal CO2 monitoring,iScience

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An ultra-small integrated CO2 infrared gas sensor for wearable end-tidal CO2 monitoring
iScience ( IF 4.6 ) Pub Date : 2023-10-23 , DOI: 10.1016/j.isci.2023.108293
Liyang Feng _{1,

2} , Yanxiang Liu ₁ , Yi Wang ₁ , Hong Zhou ₁ , Ming Wu ₁ , Tie Li ₁

Affiliation

Human physiological metabolic status can be obtained by monitoring exhaled CO2 concentration, but current CO2 sensors have disadvantages such as large size, high power consumption, and slow response time, which limit their application in wearable devices and portable instruments. In this article, we report a small size, good performance, and large range CO2 infrared gas sensor that integrates a high emissivity MEMS emitter chip, a high detectivity thermopile chip, and a high coupling efficiency optical chamber to achieve high efficiency optical-thermal-electrical conversion. Compared with typical commercial sensors, the size of the sensor can be reduced by approximately 80% to only 10 mm × 10 mm × 6.5 mm, with the advantages of low power consumption and fast response speed. Further, a monitoring system for end-tidal CO2 concentration installed on a mask was developed using this sensor, and good results were achieved.

中文翻译：

用于可穿戴呼气末 CO2 监测的超小型集成 CO2 红外气体传感器

通过监测呼出的 CO2 浓度可以获得人体生理代谢状态，但目前的 CO2 传感器存在体积大、功耗高、响应时间慢等缺点，限制了它们在可穿戴设备和便携式仪器中的应用。在本文中，我们报道了一种体积小、性能好、范围大的 CO2 红外气体传感器，它集成了高发射率 MEMS 发射器芯片、高探测率热电堆芯片和高耦合效率的光室，以实现高效的光热电转换。与典型的商用传感器相比，传感器的尺寸可以减小约 80% 至仅 10 mm，× 10 mm × 6.5 mm，具有低功耗和快速响应速度等优点。此外，使用该传感器开发了安装在面罩上的呼气末 CO2 浓度监测系统，并取得了良好的效果。

更新日期：2023-10-23

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