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Quantitative X-ray scattering and reflectivity measurements of polymer thin films with 2D detectors
Journal of Polymer Science ( IF 3.9 ) Pub Date : 2023-10-11 , DOI: 10.1002/pol.20230530
Mingqiu Hu 1 , Xuchen Gan 1 , Zhan Chen 1 , Hong‐Gyu Seong 1 , Todd Emrick 1 , Thomas P. Russell 1
Affiliation  

We describe a fully open-sourced Python package to process raw X-ray scattering data using a GANESHA SAXSLAB facility, and review in this manuscript the connection of X-ray scattering theories with the open-sourced package. This package affords researchers more flexibility in analyzing and visualizing X-ray scattering and reflectivity data from what is now a commonplace facility at many universities and research laboratories engaged in polymer research. We briefly review the applications of X-ray scattering and diffraction, followed by the scattering theories. A pedagogical introduction to processing X-ray scattering data is provided using the modules in the Python package. We compare conventions to visualize and interpret transmission and grazing-incidence scattering data using self-assembled lamellar morphology of bottlebrush copolymers as an example, then describe how area detectors measure specular and off-specular reflectivity. Examples of in-house reflectivity and grazing incidence scattering for the metrological examination of a grating are provided, where the full pitch and pitch height of a line pattern is measured easily without needing to simulate the full scattering intensity profile.

中文翻译:

使用 2D 探测器对聚合物薄膜进行定量 X 射线散射和反射率测量

我们描述了一个完全开源的 Python 包,用于使用 GANESHA SAXSLAB 工具处理原始 X 射线散射数据,并在本手稿中回顾了 X 射线散射理论与开源包的联系。该软件包为研究人员在分析和可视化 X 射线散射和反射率数据方面提供了更大的灵活性,这些数据来自目前许多从事聚合物研究的大学和研究实验室的常用设施。我们简要回顾了 X 射线散射和衍射的应用,然后介绍了散射理论。使用 Python 包中的模块提供了处理 X 射线散射数据的教学介绍。我们以瓶刷共聚物的自组装层状形态为例,比较了可视化和解释透射和掠入射散射数据的惯例,然后描述了区域探测器如何测量镜面反射率和非镜面反射率。提供了用于光栅计量检查的内部反射率和掠入射散射的示例,其中可以轻松测量线图案的全节距和节距高度,而无需模拟全散射强度分布。
更新日期:2023-10-12
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