基于 Sb2S3 的可重构光子器件的覆盖层效应,ACS Photonics

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基于 Sb2S3 的可重构光子器件的覆盖层效应
ACS Photonics ( IF 6.5 ) Pub Date : 2023-09-01 , DOI: 10.1021/acsphotonics.3c00600
Ting Yu Teo _{1,

2} , Nanxi Li ₂ , Landobasa Y. M. Tobing ₂ , Amy Sen Kay Tong ₂ , Doris Keh Ting Ng ₂ , Zhihao Ren ₃ , Chengkuo Lee ₃ , Lennon Yao Ting Lee ₂ , Robert E. Simpson ₄

Affiliation

覆盖层对于保护非易失性光子技术中使用的相变材料 (PCM) 至关重要。这项工作展示了(ZnS) _0.8 -(SiO ₂ ) _{0.2帽如何从根本上影响Sb}₂ S ₃和Ag掺杂Sb ₂ S ₃集成光子器件的性能。我们发现至少需要 30 nm 的封端材料才能保护材料免受硫损失。然而，添加此上限会以不同的方式影响两种 PCM 的结晶温度。_{Sb 2} S ₃和Ag掺杂Sb ₂ S ₃的结晶温度分别增加和减少，这归因于界面能量差异。封端和未封端的Ag掺杂Sb ₂ S ₃微环谐振器 (MRR) 器件的制造和测量是为了了解电容如何影响器件性能。令人惊讶的是，封端 PCM 结晶时 MRR 的共振频率表现出较大的红移。这种效应是由于帽增加了与 PCM 层的模态重叠。因此，电容可用于提供每单位长度更大的光学相移，从而减少这些可编程器件的总体占地面积。总体而言，我们得出的结论是，PCM 上的盖不仅可用于稳定 PCM 层，还可用于调节 PCM 结晶温度并减少器件占用空间。此外，可以利用覆盖层来增强光-物质与 PCM 元件的相互作用。

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Capping Layer Effects on Sb2S3-Based Reconfigurable Photonic Devices

Capping layers are essential for protecting phase change materials (PCMs) used in nonvolatile photonics technologies. This work demonstrates how (ZnS)_0.8-(SiO₂)_0.2 caps radically influence the performance of Sb₂S₃ and Ag-doped Sb₂S₃ integrated photonic devices. We found that at least 30 nm of capping material is necessary to protect the material from sulfur loss. However, adding this cap affects the crystallization temperatures of the two PCMs in different ways. The crystallization temperature of Sb₂S₃ and Ag-doped Sb₂S₃ increased and decreased, respectively, which is attributed to interfacial energy differences. Capped and uncapped Ag-doped Sb₂S₃ microring resonator (MRR) devices were fabricated and measured to understand how the cap affects the device performance. Surprisingly, the resonance frequency of the MRR exhibited a larger red-shift upon crystallization for the capped PCMs. This effect was due to the cap increasing the modal overlap with the PCM layer. Caps can therefore be used to provide a greater optical phase shift per unit length, thus reducing the overall footprint of these programmable devices. Overall, we concluded that caps on PCMs are not just useful for stabilizing the PCM layer but can also be used to tune the PCM crystallization temperature and reduce device footprint. Moreover, the capping layer can be exploited to enhance the light–matter interactions with the PCM element.

更新日期：2023-09-01

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