The on-site detection of the geometrical topography and composition distribution of unknown minerals is a key bottleneck in the field of deep space exploration and geological material analysis. A novel portable confocal-controlled laser-induced breakdown spectroscopy (PCCLIBS) scanning three-dimensional (3D) imaging method with high spatial resolution and highly integrated structure was proposed to solve this problem. The method utilizes a confocal-controlled LIBS technique to achieve precise focusing of the sample, significantly improving the spatial resolution of the LIBS mapping system. In addition, we employ a dual two-dimensional (2D) MEMS mirror scanning technique to achieve a miniaturized design of LIBS mapping system. These two technologies are combined to achieve miniaturization, high spatial resolution, and 3D LIBS microelement imaging. The method had an axial focusing ability of ∼ 60 nm and a lateral resolution of geometrical and elemental maps of around 700 nm and 10 μm, respectively, using an objective lens with a numerical aperture (NA) of 0.4. Finally, we performed the LIBS and topographic imaging of carbonaceous chondrite (Northwest Africa 13323) using the PCCLIBS system to realize multi-information of the micro-regional chemical, element, and topographic information imaging in the sample. These results demonstrate that this method is an effective approach for the elemental characterization of LIBS in samples with complex morphologies, such as in planet landing exploration and geological exploration.

未知矿物几何形貌和成分分布的现场检测是深空探测和地质材料分析领域的关键瓶颈。为了解决这一问题，提出了一种具有高空间分辨率和高度集成结构的新型便携式共焦控制激光诱导击穿光谱（PCCLIBS）扫描三维（3D）成像方法。该方法利用共焦控制的LIBS技术实现样品的精确聚焦，显着提高了LIBS测绘系统的空间分辨率。此外，我们采用双二维（2D）MEMS镜扫描技术来实现LIBS测绘系统的小型化设计。这两种技术相结合可实现小型化、高空间分辨率和 3D LIBS 微元件成像。该方法使用数值孔径 (NA) 为 0.4 的物镜，轴向聚焦能力约为 60 nm，几何和元素图的横向分辨率分别约为 700 nm 和 10 μm。最后，利用PCCLIBS系统对碳质球粒陨石（西北非洲13323）进行了LIBS和形貌成像，实现了样品中微区域化学、元素和形貌信息的多信息成像。这些结果表明，该方法是对具有复杂形态的样品中 LIBS 进行元素表征的有效方法，例如在行星着陆勘探和地质勘探中。使用数值孔径 (NA) 为 0.4 的物镜。最后，利用PCCLIBS系统对碳质球粒陨石（西北非洲13323）进行了LIBS和形貌成像，实现了样品中微区域化学、元素和形貌信息的多信息成像。这些结果表明，该方法是对具有复杂形态的样品中 LIBS 进行元素表征的有效方法，例如在行星着陆勘探和地质勘探中。使用数值孔径 (NA) 为 0.4 的物镜。最后，利用PCCLIBS系统对碳质球粒陨石（西北非洲13323）进行了LIBS和形貌成像，实现了样品中微区域化学、元素和形貌信息的多信息成像。这些结果表明，该方法是对具有复杂形态的样品中 LIBS 进行元素表征的有效方法，例如在行星着陆勘探和地质勘探中。