Many electronic systems depend on microelectromechanical system and nanoelectromechanical system resonators for frequency control applications such as clock signal generation and wireless communication. Hundreds of resonators with frequencies from 32 kHz to 6 GHz can be heterogeneously integrated with complementary metal–oxide–semiconductor circuits. However, heterogeneous integration creates large overheads—such as system size and power consumption—limiting the potential for dynamic spectrum use and frequency extension to centimetre- and millimetre-wave regimes. Here we report switchable nanoelectromechanical system resonators with wide spectrum coverage, which are based on hafnia–zirconia–alumina (Hf_0.5Zr_0.5O₂–Al₂O₃) superlattice transducers. The superlattice structure, together with pulsed-poling-induced ferroelastic reorientation, enables large linear electromechanical coupling and high quality factor in lateral- and thickness-oriented bulk acoustic wave modes. The monolithic nanoelectromechanical system resonators offer frequencies of 0.4–17.3 GHz, frequency–quality products up to 4.04 × 10¹² Hz and electromechanical couplings of 2.5%. Using a d.c. bias voltage to depolarize the transducers, we also show that the resonators can be switched off to their electromechanical noise floor, creating an on/off isolation of 37 dB.

许多电子系统依赖于微机电系统和纳米机电系统谐振器来实现频率控制应用，例如时钟信号生成和无线通信。数百个频率从 32 kHz 到 6 GHz 的谐振器可以与互补金属氧化物半导体电路异构集成。然而，异构集成会产生巨大的开销（例如系统尺寸和功耗），从而限制了动态频谱使用和频率扩展至厘米波和毫米波范围的潜力。在这里，我们报告了具有宽光谱覆盖范围的可切换纳米机电系统谐振器，该谐振器基于铪-氧化锆-氧化铝（Hf _0.5 Zr _0.5 O ₂ -Al ₂ O ₃）超晶格换能器。超晶格结构与脉冲极化引起的铁弹性重定向一起，在横向和厚度定向体声波模式中实现了大的线性机电耦合和高品质因数。^{单片纳米机电系统谐振器提供 0.4–17.3 GHz 的频率、高达 4.04 × 10 12} Hz的频率质量产品 和 2.5% 的机电耦合。使用直流偏置电压对换能器进行去极化，我们还表明谐振器可以关闭其机电本底噪声，从而产生 37 dB 的开/关隔离。