A commercial-ready amine-based CO₂ capture process (CCP) restricts its potential for industrial deployment at a high capture rate to achieve a net-zero carbon target due to its energy-intensive nature. This study aims to enhance the energy efficiency of a monoethanolamine (MEA)-based CCP, operating at a 95% capture rate, by developing advanced process modules that utilize low-grade waste heat. To establish a foundation for designing cascade modules that can recover energy from all available waste heat, the waste heat characteristics were analyzed, and the feasibility of four single modules was explored to recover the latent heat in a stripped gas. Subsequently, this study comparatively investigated the equivalent electrical works of the two designed cascade modules combined with lean vapor compression (LVC). A techno-analysis indicated that cascade modules provided outstanding energy-saving performance ranging from 12.27% to 24.55%, with an average improvement of 50% over single modules. Although the cascade modules combined with LVC showed similar energy-saving performances, higher robustness for equivalence factor (EF) and more energy-savings were discovered in the electricity generation and direct heat supply strategies, respectively. Economic analysis indicated that advanced process modules were economically feasible, with a savings-to-investment ratio (SIR) exceeding 1. The SIR and payback period (PBP) depended on EF and electricity prices. Significantly, the cascade module for direct heat supply emerged as the most appropriate in terms of both economic viability and energy-saving efficiency in amine-based CCPs, particularly at a higher EF.