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Advances in Flexible Thermoelectric Materials and Devices Fabricated by Magnetron Sputtering
Small Science ( IF 11.1 ) Pub Date : 2023-07-18 , DOI: 10.1002/smsc.202300061
Boxuan Hu 1 , Xiao-Lei Shi 1 , Tianyi Cao 1 , Meng Li 1 , Wenyi Chen 1, 2 , Wei-Di Liu 1, 3 , Wanyu Lyu 1 , Tuquabo Tesfamichael 4 , Zhi-Gang Chen 1
Small Science ( IF 11.1 ) Pub Date : 2023-07-18 , DOI: 10.1002/smsc.202300061
Boxuan Hu 1 , Xiao-Lei Shi 1 , Tianyi Cao 1 , Meng Li 1 , Wenyi Chen 1, 2 , Wei-Di Liu 1, 3 , Wanyu Lyu 1 , Tuquabo Tesfamichael 4 , Zhi-Gang Chen 1
Affiliation
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Due to the direct conversion between thermal and electrical energy, thermoelectric materials and their devices exhibit great potential for power generation and refrigeration. With the rapid development of personal wearable electronics, the design of flexible inorganic thermoelectric materials and devices receives increasing attention. As one of the most mature thin-film fabrication techniques, magnetron sputtering plays a key role in the fabrication of inorganic thermoelectric thin films and devices, but its progress is still not timely and comprehensively reviewed. Herein, recent advances in magnetron sputtering-fabricated thermoelectric materials and devices are studied, including their thermoelectric properties, mechanical properties, and device design routes. The differences in the properties of thermoelectric materials under different sputtering conditions, as well as their underlying mechanisms, are carefully discussed. In the end, it is pointed out the challenges and future directions for magnetron sputtering-prepared inorganic thermoelectric thin-film materials and devices for practical applications. This review can serve as a useful reference to guide the design of inorganic thermoelectric materials and devices prepared by magnetron-sputtering-based deposition techniques.
中文翻译:
磁控溅射制造的柔性热电材料和器件的进展
由于热能和电能之间的直接转换,热电材料及其器件在发电和制冷方面表现出巨大的潜力。随着个人可穿戴电子产品的快速发展,柔性无机热电材料和器件的设计越来越受到关注。磁控溅射作为最成熟的薄膜制备技术之一,在无机热电薄膜和器件的制备中发挥着关键作用,但其进展仍未得到及时、全面的综述。本文研究了磁控溅射制造的热电材料和器件的最新进展,包括它们的热电性能、机械性能和器件设计路线。仔细讨论了不同溅射条件下热电材料性能的差异及其潜在机制。最后指出磁控溅射制备无机热电薄膜材料与器件实际应用面临的挑战和未来发展方向。该综述可以为指导磁控溅射沉积技术制备的无机热电材料和器件的设计提供有用的参考。
更新日期:2023-07-18
中文翻译:
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磁控溅射制造的柔性热电材料和器件的进展
由于热能和电能之间的直接转换,热电材料及其器件在发电和制冷方面表现出巨大的潜力。随着个人可穿戴电子产品的快速发展,柔性无机热电材料和器件的设计越来越受到关注。磁控溅射作为最成熟的薄膜制备技术之一,在无机热电薄膜和器件的制备中发挥着关键作用,但其进展仍未得到及时、全面的综述。本文研究了磁控溅射制造的热电材料和器件的最新进展,包括它们的热电性能、机械性能和器件设计路线。仔细讨论了不同溅射条件下热电材料性能的差异及其潜在机制。最后指出磁控溅射制备无机热电薄膜材料与器件实际应用面临的挑战和未来发展方向。该综述可以为指导磁控溅射沉积技术制备的无机热电材料和器件的设计提供有用的参考。