基于LiNbO3/SiO2/SiC异质结构且敏感层为聚乙烯亚胺-SiO2纳米复合材料的5.7 GHz超灵敏剪切水平表面声波湿度传感器,ACS Applied Materials & Interfaces

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基于LiNbO3/SiO2/SiC异质结构且敏感层为聚乙烯亚胺-SiO2纳米复合材料的5.7 GHz超灵敏剪切水平表面声波湿度传感器
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2023-07-18 , DOI: 10.1021/acsami.3c02642
Yanghui Liu ₁ , Jian Zhou ₁ , Zhangbin Ji ₁ , Fengling Zhuo ₁ , Shengyu Wen ₁ , Yiqin Chen ₁ , YongQing Fu ₂ , Huigao Duan ₁

Affiliation

湿度传感和水分子监测因其在监测人类呼吸/生理条件、温室空调和农业土壤湿度方面的潜在应用而成为热门研究课题。然而，具有无线和快速响应能力的高灵敏度、高精度湿度检测面临着巨大的挑战。在这项工作中，提出了一种混合/协同策略，使用LiNbO ₃ /SiO ₂ /SiC异质结构来产生剪切水平（SH）表面声波（SAW）并使用聚乙烯亚胺-二氧化硅纳米颗粒（PEI-SiO 2 ）的纳米复合_材料NPs）形成敏感层，从而实现声表面波湿度传感器的超高灵敏度。_{在LiNbO 3} /SiO ₂ /SiC高速异质结构上获得了超高频（1∼15 GHz）SAW器件。^{在多模态波模式中，我们选择SH波进行湿度传感，并实现了5383 MHz·mm 2} ·μg ^–1的高质量灵敏度。以PEI-SiO ₂ NP复合材料作为敏感层，获得了2.02 MHz/% RH的超高灵敏度，在湿度范围内比传统SAW湿度传感器（~202.5 MHz频率）高两个数量级20–80% 相对湿度。

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5.7 GHz Ultrasensitive Shear Horizontal-Surface Acoustic Wave Humidity Sensor Based on LiNbO3/SiO2/SiC Heterostructures with a Sensitive Layer of Polyethyleneimine-SiO2 Nanocomposites

Humidity sensing and water molecule monitoring have become hot research topics attributed to their potential applications in monitoring breathing/physiological conditions of humans, air conditioning in greenhouses, and soil moisture in agriculture. However, there is a huge challenge for highly sensitive and precision humidity detection with wireless and fast responsive capabilities. In this work, a hybrid/synergistic strategy was proposed using a LiNbO₃/SiO₂/SiC heterostructure to generate shear-horizontal (SH) surface acoustic waves (SAWs) and using a nanocomposite of polyethylenimine-silicon dioxide nanoparticles (PEI-SiO₂ NPs) to form a sensitive layer, thus achieving an ultrahigh sensitivity of SAW humidity sensors. Ultrahigh frequencies (1∼15 GHz) of SAW devices were obtained on a high-velocity heterostructure of LiNbO₃/SiO₂/SiC. Among the multimodal wave modes, we selected SH waves for humidity sensing and achieved a high mass-sensitivity of 5383 MHz · mm² · μg^–1. With the PEI-SiO₂ NP composite as the sensitive layer, an ultrahigh sensitivity of 2.02 MHz/% RH was obtained, which is two orders of magnitude higher than those of the conventional SAW humidity sensors (∼202.5 MHz frequency) within a humidity range of 20–80% RH.

更新日期：2023-07-18

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