Rational structure design of sensing materials is the most effective way to obtain a hydrogen (H) sensor with optimal performance. Herein, a porous heterostructure WO-C/InO was designed and prepared by in-situ coupling carbon layer and WO into MOF-derived (metal organic framework) InO. In combination with Micro-Electro-Mechanical System (MEMS), a miniature H sensor using WO-C/InO as the active sensing material was fabricated. Compared with the bare InO sensor, the sensor based on WCI-9 (the mass ratio of WO to InO in WO-C/InO is 9 wt%) shows higher response value and lower operating temperature (/ = 10.11@ 1000 ppm; 250 °C). Moreover, the WCI-9 sensor possesses a fast response-recovery speed (1.9/9.2 s@200 ppm) and a low limit of detection (LOD) (5 ppm) for H. The good performance of the WCI-9 sensor is attributed to the hierarchical porous structure and multicomponent heterojunctions present in the material. This work not only provides an effective method for H detection, but also a strategy for constructing sensing materials with multicomponent heterojunctions.

中文翻译：

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基于 MOF 衍生的 WO3-C/In2O3 异质结构的 MEMS 传感器，用于氢检测

合理的传感材料结构设计是获得性能最佳的氢（H）传感器的最有效途径。在此，通过将碳层和WO原位耦合到MOF衍生的（金属有机骨架）InO中，设计并制备了多孔异质结构WO-C/InO。结合微机电系统（MEMS），制作了一种采用WO-C/InO作为活性传感材料的微型H传感器。与裸InO传感器相比，基于WCI-9（WO-C/InO中WO与InO的质量比为9 wt%）的传感器表现出更高的响应值和更低的工作温度（/ = 10.11@ 1000 ppm; 250 ℃）。此外，WCI-9传感器具有快速的响应恢复速度（1.9/9.2 s@200 ppm）和H的低检测限（LOD）（5 ppm）。WCI-9传感器的良好性能归功于材料中存在的分层多孔结构和多组分异质结。这项工作不仅为H检测提供了一种有效的方法，而且为构建多组分异质结传感材料提供了一种策略。