Despite the extensive developments of flexible capacitive pressure sensors, it is still elusive to simultaneously achieve excellent linearity over a broad pressure range, high sensitivity, and ultrahigh pressure resolution under large pressure preloads. Here, we present a programmable fabrication method for microstructures to integrate an ultrathin ionic layer. The resulting optimized sensor exhibits a sensitivity of 33.7 kPa⁻¹ over a linear range of 1700 kPa, a detection limit of 0.36 Pa, and a pressure resolution of 0.00725% under the pressure of 2000 kPa. Taken together with rapid response/recovery and excellent repeatability, the sensor is applied to subtle pulse detection, interactive robotic hand, and ultrahigh-resolution smart weight scale/chair. The proposed fabrication approaches and design toolkit from this work can also be leveraged to easily tune the pressure sensor performance for varying target applications and open up opportunities to create other iontronic sensors.

尽管柔性电容式压力传感器得到了广泛的发展，但在大压力预载下同时实现宽压力范围内的优异线性度、高灵敏度和超高压分辨率仍然是难以实现的。在这里，我们提出了一种用于微结构集成超薄离子层的可编程制造方法。由此产生的优化传感器的灵敏度为 33.7 kPa ^-1线性范围为1700 kPa，检测限为0.36 Pa，2000 kPa压力下压力分辨率为0.00725%。该传感器具有快速响应/恢复和出色的重复性，可应用于细微脉搏检测、交互式机械手和超高分辨率智能体重秤/椅子。这项工作中提出的制造方法和设计工具包也可以用于轻松调整压力传感器的性能以适应不同的目标应用，并为创建其他离子电子传感器提供机会。