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Multiwavelength Emission from InGaN/GaN MQW Truncated Pyramids Grown on a GaN Dodecagonal Pyramid Template
Crystal Growth & Design ( IF 3.2 ) Pub Date : 2023-04-20 , DOI: 10.1021/acs.cgd.2c01399
Shiying Zhang 1 , Qingjun Xu 2 , Lei Zhang 2 , Guodong Wang 2 , Shouzhi Wang 2 , Xu Zhang 3
Affiliation  

InGaN/GaN multiple quantum well (MQW) truncated pyramids with multiwavelength emission were successfully fabricated by means of a simple and low-cost regrowth method on a GaN dodecagonal pyramid template. This template obtained by H3PO4 etching the N-ploar GaN bulk material showed six pairs of alternating Ga-polar and N-polar edges. The luminescence properties of the InGaN/GaN MQW structure were investigated by both photoluminescence (PL) and spatially resolved cathodoluminescence (CL) with scanning electron microscopy (SEM) measurements. It was found that the emission wavelength of InGaN/GaN MQWs was very broad and red-shifted from the bottom to the top of the pyramid. The high emission intensity around 420–480 nm originated from the edges and sidewall of the pyramids. Additionally, longer emissions from the (1̅1̅22̅) facet MQWs and the periphery of the micron-sized truncated pyramid (TP) were observed, consisting of multiple peaks ranging from 460 to 540 nm. Furthermore, the growth model of MQWs on GaN dodecagonal pyramid templates was established to explain the nonuniformity in distribution and flower- or star-like pattern formation on pyramid sidewalls. It took into account the combined effects of strain distribution at the InGaN/GaN heterostructure interface, different incorporation rates of Ga and In atoms at Ga- or N-polar surfaces, and different diffusion lengths of Ga and In adatoms on GaN template lateral facets. The proposed structure, due to its low-cost and easy fabrication process, could be a promising candidate for highly efficient broadband visible light-emitting devices.

中文翻译:

在 GaN 十二角金字塔模板上生长的 InGaN/GaN MQW 截头金字塔的多波长发射

通过在 GaN 十二角金字塔模板上进行简单且低成本的再生长方法,成功地制造了具有多波长发射的 InGaN/GaN 多量子阱 (MQW) 截头金字塔。该模板由 H 3 PO 4蚀刻 N-ploar GaN 块状材料显示出六对交替的 Ga 极性和 N 极性边缘。通过光致发光 (PL) 和空间分辨阴极发光 (CL) 以及扫描电子显微镜 (SEM) 测量研究了 InGaN/GaN MQW 结构的发光特性。发现 InGaN/GaN MQW 的发射波长非常宽,并且从金字塔底部到顶部发生红移。420-480 nm 附近的高发射强度源自金字塔的边缘和侧壁。此外,观察到来自 (1̅1̅22̅) 小平面 MQW 和微米级截头金字塔 (TP) 外围的更长发射,由 460 至 540 nm 范围内的多个峰组成。此外,建立了多量子阱在 GaN 十二角金字塔模板上的生长模型,以解释金字塔侧壁上分布的不均匀性和花状或星状图案的形成。它考虑了 InGaN/GaN 异质结构界面处的应变分布、Ga 和 In 原子在 Ga 或 N 极表面的不同掺入率以及 Ga 和 In 吸附原子在 GaN 模板侧面上的不同扩散长度的综合影响。由于其低成本和易于制造工艺,所提出的结构可能成为高效宽带可见光发射器件的有前途的候选者。Ga 和 In 原子在 Ga 或 N 极表面的不同掺入率,以及 Ga 和 In 吸附原子在 GaN 模板侧面的不同扩散长度。由于其低成本和易于制造工艺,所提出的结构可能成为高效宽带可见光发射器件的有前途的候选者。Ga 和 In 原子在 Ga 或 N 极表面的不同掺入率,以及 Ga 和 In 吸附原子在 GaN 模板侧面的不同扩散长度。由于其低成本和易于制造工艺,所提出的结构可能成为高效宽带可见光发射器件的有前途的候选者。
更新日期:2023-04-20
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