制造半导体器件新型电极的方法：掺杂和范德华集成有机半导体薄膜,Small

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制造半导体器件新型电极的方法：掺杂和范德华集成有机半导体薄膜
Small ( IF 13.0 ) Pub Date : 2023-03-22 , DOI: 10.1002/smll.202207858
Ping-An Chen _{1,

2,

3} , Junjun Guo ₄ , Xinwen Yan ₅ , Yu Liu _{1,

2} , Huan Wei _{1,

2} , Xincan Qiu _{1,

2} , Jiangnan Xia _{1,

2} , Jing Guo ₁ , Jiaqi Ding ₁ , Zhenqi Gong ₁ , Chen Chen ₆ , Ting Lei ₅ , Huajie Chen ₇ , Zebing Zeng ₈ , Yuanyuan Hu _{1,

2,

3}

Affiliation

International Science and Technology Innovation Cooperation Base for Advanced Display Technologies of Hunan Province, School of Physics and Electronics, Hunan University, Changsha, 410082, P. R. China.
Shenzhen Research Institute of Hunan University, Shenzhen, 518063, P. R. China.
Changsha Semiconductor Technology and Application Innovation Research Institute, College of Semiconductors (College of Integrated Circuits), Hunan University, Changsha, 410082, P. R. China.
Institute of Functional Nano & Soft Materials (FUNSOM) Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, Suzhou, 215123, P. R. China.
Key Laboratory of Polymer Chemistry and Physics of Ministry of Education, School of Materials Science and Engineering, Peking University, Beijing, 100871, P. R. China.
Science and Technology on Advanced Ceramic Fibers and Composites Laboratory, College of Aerospace Science and Engineering, National University of Defense Technology, Changsha, 410000, P. R. China.
Key Laboratory of Environmentally Friendly Chemistry and Applications of Ministry of Education, College of Chemistry, Xiangtan University, Xiangtan, 411105, P. R. China.
State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha, 410082, P. R. China.

电极是半导体器件中不可或缺的部件，目前主要由金属制成，虽然使用方便，但对于生物电子、柔性电子或透明电子等新兴技术来说并不理想。这里提出并演示了使用有机半导体（OSC）制造半导体器件新型电极的方法。结果表明，聚合物半导体可以进行重度 p 或 n 掺杂，以获得足够高的电极电导率。与金属相比，掺杂 OSC 薄膜（DOSCF）可进行溶液加工、机械柔性，并且具有令人感兴趣的光电特性。通过范德华接触将 DOSCF 与半导体集成，可以构建不同类型的半导体器件。重要的，这些器件表现出比金属电极器件更高的性能，和/或金属电极器件所不具备的优异的机械或光学性能，表明 DOSCF 电极的优越性。鉴于现有大量的OSC，所建立的方法可以提供丰富的电极选择，以满足各种新兴设备的需求。

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更新日期：2023-03-22

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