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Self-Powered Rapid Response Flexible Pressure Sensor for Wearable Application
Advanced Engineering Materials ( IF 3.4 ) Pub Date : 2023-03-09 , DOI: 10.1002/adem.202201678 Junwei Yin 1 , Shuning Guo 1 , E Mingfeng 1 , Hui Liu 1 , Zhihui Liu 2 , Wanyu Ding 2 , Dongming Li 3 , Yunxian Cui 1
Advanced Engineering Materials ( IF 3.4 ) Pub Date : 2023-03-09 , DOI: 10.1002/adem.202201678 Junwei Yin 1 , Shuning Guo 1 , E Mingfeng 1 , Hui Liu 1 , Zhihui Liu 2 , Wanyu Ding 2 , Dongming Li 3 , Yunxian Cui 1
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Flexible pressure sensors have attracted a lot of attention in fields such as medicine and healthcare due to their ease of making wearable devices. However, the development of flexible pressure sensors is facing the challenges of a complex manufacturing process and high cost. Herein, a zinc oxide (ZnO) piezoelectric film flexible pressure sensor with a 3 × 3 sensor array presented through an extremely simple and ultralow-cost fabrication process is reported. The 3 × 3 sensor array in series and again, in parallel. The output voltage of the 3 × 3 sensor array is significantly higher compared to the original thin-film piezoelectric sensors at the same film thickness. The ZnO flexible pressure sensor shows good linear sensitivity and high durability over 4000 cycles of loading in the test range of 0–14 N. The response and recovery times tend to decrease as the dynamic pressure increases in the experimental range. Furthermore, a high-precision dynamic force calibration system through a comparison between the open-loop and closed-loop strategies used in the dynamic force calibration experiments that are performed is presented. Potential applications of the sensor are demonstrated, including elbow flexure and finger tapping. The sensor also shows the ease of massive fabrication.
中文翻译：
适用于可穿戴应用的自供电快速响应柔性压力传感器
柔性压力传感器由于易于制造可穿戴设备，在医学和医疗保健等领域引起了广泛关注。然而，柔性压力传感器的发展面临着制造工艺复杂、成本高等挑战。本文报道了一种氧化锌 (ZnO) 压电薄膜柔性压力传感器，具有 3 × 3 传感器阵列，通过极其简单和超低成本的制造工艺呈现。3 × 3 传感器阵列串联和并联。在相同膜厚下，3×3传感器阵列的输出电压明显高于原始薄膜压电传感器。ZnO柔性压力传感器在0-14 N的测试范围内经过4000次负载循环后表现出良好的线性灵敏度和高耐用性。在实验范围内，随着动态压力的增加，响应和恢复时间趋于减少。此外，通过对动态力校准实验中使用的开环和闭环策略进行比较，提出了一种高精度动态力校准系统。演示了传感器的潜在应用，包括肘部弯曲和手指敲击。该传感器还显示了大规模制造的便利性。
更新日期：2023-03-09
中文翻译：
适用于可穿戴应用的自供电快速响应柔性压力传感器
柔性压力传感器由于易于制造可穿戴设备，在医学和医疗保健等领域引起了广泛关注。然而，柔性压力传感器的发展面临着制造工艺复杂、成本高等挑战。本文报道了一种氧化锌 (ZnO) 压电薄膜柔性压力传感器，具有 3 × 3 传感器阵列，通过极其简单和超低成本的制造工艺呈现。3 × 3 传感器阵列串联和并联。在相同膜厚下，3×3传感器阵列的输出电压明显高于原始薄膜压电传感器。ZnO柔性压力传感器在0-14 N的测试范围内经过4000次负载循环后表现出良好的线性灵敏度和高耐用性。在实验范围内，随着动态压力的增加，响应和恢复时间趋于减少。此外，通过对动态力校准实验中使用的开环和闭环策略进行比较，提出了一种高精度动态力校准系统。演示了传感器的潜在应用，包括肘部弯曲和手指敲击。该传感器还显示了大规模制造的便利性。
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