We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si₃N₄ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the Si₃N₄ membrane. The measured resonance frequencies and spatial profiles of the modes are consistent with finite-element simulations based on idealized geometry. Spectra of the thermal motion reveal that, depending on the degree of hybridization with modes of the heavier and higher-quality-factor Si₃N₄ membrane, the quality factors and the motional mass of the hBN drum modes can be shifted by orders of magnitude. This effect could be exploited to engineer hybrid drum/membrane modes that combine the low motional mass of 2D materials with the high quality factor of Si₃N₄ membranes for optomechanical or sensing applications.

中文翻译：

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高 Q 混合 hBN/Si3N4 谐振器的机械模式成像

我们对由悬挂在高应力 Si ₃ N ₄膜上的 hBN 制成的 2D 鼓谐振器的机械模式进行成像和表征。我们的测量证明了 hBN 谐振器的各种模式与 Si ₃ N ₄膜的各种模式之间的杂化。模式的测量共振频率和空间分布与基于理想化几何的有限元模拟一致。_{热运动的光谱表明，取决于与较重和较高品质因数的 Si 3} N ₄模式的杂化程度膜，hBN 鼓模式的品质因数和运动质量可以按数量级移动。_{这种效应可用于设计混合鼓/膜模式，将二维材料的低运动质量与 Si 3} N ₄膜的高质量因子相结合，用于光机械或传感应用。