<br>激光碳化——图案化电子碳微制造的强大工具,Advanced Materials

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激光碳化——图案化电子碳微制造的强大工具
Advanced Materials ( IF 27.4 ) Pub Date : 2023-02-26 , DOI: 10.1002/adma.202211054
Mamta Devi ₁ , Huize Wang ₂ , Sanghwa Moon ₂ , Swati Sharma ₁ , Volker Strauss ₂

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利用天然的可再生资源制造电子设备是工程和材料科学的共同目标。在这方面，碳因其生物相容性、导电性和电化学稳定性而具有特殊意义。然而，在微电子领域，碳的器件应用往往受到繁琐且昂贵的制备过程以及缺乏对加工和材料参数的控制的限制。激光辅助碳化正在成为一种精确、选择性合成用于柔性设备应用的功能性碳基材料的工具。与通过炉内热解进行的传统碳化相比，激光碳化是通过光热诱导的，并且发生在毫秒的时间尺度上。通过仔细选择前驱体和工艺参数，可以调整这种所谓的激光图案化碳（LP-C）的性能，例如孔隙率、表面极性、官能团、石墨化程度、载流子结构等。在这篇批判性评论中，在一般碳化策略、激光诱导材料加工的基础知识和柔性电子应用（如传感器电极、电催化剂、能量存储或天线）的背景下，对激光碳化产生了共同的观点。我们试图同时重视材料加工和应用方面，以便这种新兴技术能够在碳基微加工的更广泛背景下得到最佳定位。

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Laser-Carbonization – A Powerful Tool for Micro-Fabrication of Patterned Electronic Carbons

Fabricating electronic devices from natural, renewable resources is a common goal in engineering and materials science. In this regard, carbon is of special significance due to its biocompatibility combined with electrical conductivity and electrochemical stability. In microelectronics, however, carbon's device application is often inhibited by tedious and expensive preparation processes and a lack of control over processing and material parameters. Laser-assisted carbonization is emerging as a tool for the precise and selective synthesis of functional carbon-based materials for flexible device applications. In contrast to conventional carbonization via in-furnace pyrolysis, laser-carbonization is induced photo-thermally and occurs on the time-scale of milliseconds. By careful selection of the precursors and process parameters, the properties of this so-called laser-patterned carbon (LP-C) such as porosity, surface polarity, functional groups, degree of graphitization, charge-carrier structure, etc. can be tuned. In this critical review, a common perspective is generated on laser-carbonization in the context of general carbonization strategies, fundamentals of laser-induced materials processing, and flexible electronic applications, like electrodes for sensors, electrocatalysts, energy storage, or antennas. An attempt is made to have equal emphasis on material processing and application aspects such that this emerging technology can be optimally positioned in the broader context of carbon-based microfabrication.

更新日期：2023-02-26

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