The microring modulator (MRM) is a small-size and low-power component, which is the potential for the next-generation optical interconnection. By the theoretical analysis, increasing the electrical bandwidth, which is relevant to the cross section and the doping concentration of the doping region, is a better way to increase electro-optical (EO) bandwidth. Therefore, a new doping profile of the PN depletion region with 4 doping concentration levels is introduced considering the electrical bandwidth. Based on the new doping profile, the MRM with the 160 μm length and the 0.33 and 0.2 μm coupling space are determined considering the trade-off between the EO bandwidth, quality factor (Q), extinction ratio, area of MRM, and power consumption. Moreover, the MRM is characterised and is applied in a wavelength division multiplexing transmitter. By the measurement, the transmitter with the designed MRM could transmit PAM4 signal at 52 Gbps rate, which indicates the MRM could be potential for the 50 Gbps/ch optical interconnection.

中文翻译：

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高带宽硅光子微环调制器的高效协同设计与测量验证

微环调制器（MRM）是一种体积小、功耗低的器件，是下一代光互连的潜力所在。通过理论分析，增加与掺杂区的横截面和掺杂浓度相关的电带宽是增加电光（EO）带宽的更好方法。因此，考虑到电带宽，引入了具有 4 个掺杂浓度水平的 PN 耗尽区的新掺杂分布。基于新的掺杂分布，考虑到 EO 带宽、品质因数 ( Q)、消光比、MRM 面积和功耗。此外，MRM的特点是应用于波分复用发射机。通过测量，具有设计的MRM的发射器可以以52 Gbps的速率传输PAM4信号，这表明MRM在50 Gbps / ch光互连方面具有潜力。