<br>AlScN/Al2O3 的拉曼光谱和光谱特征,Micromachines

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AlScN/Al2O3 的拉曼光谱和光谱特征
Micromachines ( IF 3.0 ) Pub Date : 2022-11-11 , DOI: 10.3390/mi13111961
Dmytro Solonenko ₁ , Agnė Žukauskaitė ₂ , Julian Pilz ₁ , Mohssen Moridi ₁ , Sarah Risquez ₁

Affiliation

III-V 族固溶体由于其随机性而对生长条件敏感。高结晶薄膜需要对材料特性的深刻理解和可靠的测定方法。在这项工作中，我们研究了 Al 的拉曼光谱指纹

_{1 - x}

ScN 薄膜的 Sc 浓度x = 0、0.14、0.17、0.23、0.32 和 0.41，生长在 Al2O(0001) 基板上。光谱显示，随着 Sc 含量的增加，与主要纤锌矿相相关的模式软化和加宽，与相应的 XRD 结果一致。我们通过将平均晶粒尺寸与声子相关长度进行比较，研究了导致巨大模式线宽的主要散射机制，表明合金化增加了点缺陷密度。低频拉曼谱带归因于共成型 ScN 纳米粒子中的受限球形声学模式。与温度相关的拉曼测量能够确定所有 Sc 浓度的 E（高）模式的温度系数，以便在基于 AlScN 的器件中进行精确的温度监测。

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Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3

III-V solid solutions are sensitive to growth conditions due to their stochastic nature. The highly crystalline thin films require a profound understanding of the material properties and reliable means of their determination. In this work, we have investigated the Raman spectral fingerprint of Al

_{1 - x}

_{x}

N thin films with Sc concentrations x = 0, 0.14, 0.17, 0.23, 0.32, and 0.41, grown on Al

_{2}

_{3}

(0001) substrates. The spectra show softening and broadening of the modes related to the dominant wurtzite phase with increasing Sc content, in agreement with the corresponding XRD results. We investigated the primary scattering mechanism responsible for the immense modes’ linewidths by comparing the average grain sizes to the phonon correlation length, indicating that alloying augments the point defect density. The low-frequency Raman bands were attributed to the confined spherical acoustic modes in the co-forming ScN nanoparticles. Temperature-dependent Raman measurements enabled the temperature coefficient of the E