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Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction
ACS Nano ( IF 15.8 ) Pub Date : 2022-11-10 , DOI: 10.1021/acsnano.2c08650 Mengya Guo 1 , James T Brewster Ii 2 , Huacheng Zhang 1, 3 , Yuxin Zhao 1 , Yanli Zhao 3
ACS Nano ( IF 15.8 ) Pub Date : 2022-11-10 , DOI: 10.1021/acsnano.2c08650 Mengya Guo 1 , James T Brewster Ii 2 , Huacheng Zhang 1, 3 , Yuxin Zhao 1 , Yanli Zhao 3
Affiliation
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Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.
中文翻译：
基于微机电系统的化学嗅觉化学电阻器的挑战和机遇
基于微机电系统 (MEMS) 的半导体气体传感器被认为是后摩尔时代发展最快的跨学科高科技之一。这一领域的现代进步包括可穿戴电子产品、物联网和人工大脑启发的智能等模式，从而带来了以更高性能、更低成本和更广泛适用性驱动基于 MEMS 的气体传感器的机会。然而，对在单个芯片上采用统一工艺的微型和微功率传感器的高需求带来了巨大的挑战。本综述侧重于基于 MEMS 的微米级和纳米级气体传感器的最新发展和缺陷，并详细介绍了未来趋势。我们还介绍了该主题的背景、开创性的成果、当前的应用和挑战，以及下一代系统的机遇。
更新日期：2022-11-10
中文翻译：
基于微机电系统的化学嗅觉化学电阻器的挑战和机遇
基于微机电系统 (MEMS) 的半导体气体传感器被认为是后摩尔时代发展最快的跨学科高科技之一。这一领域的现代进步包括可穿戴电子产品、物联网和人工大脑启发的智能等模式，从而带来了以更高性能、更低成本和更广泛适用性驱动基于 MEMS 的气体传感器的机会。然而，对在单个芯片上采用统一工艺的微型和微功率传感器的高需求带来了巨大的挑战。本综述侧重于基于 MEMS 的微米级和纳米级气体传感器的最新发展和缺陷，并详细介绍了未来趋势。我们还介绍了该主题的背景、开创性的成果、当前的应用和挑战，以及下一代系统的机遇。
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