Sensors and Actuators A: Physical ( IF 4.1 ) Pub Date : 2022-11-08 , DOI: 10.1016/j.sna.2022.113997 Jiyoun Seo , Jeong-Yeon Hwang , Chang-Hyeon Ji
In this research, an omnidirectional scanning micromirror fabricated using a three-dimensional (3D) printing process and manual assembly is presented. The core part of the scanning micromirror is printed with photocurable resin using vat polymerization based on digital light processing. Externally fabricated 6mm-diameter aluminum-coated silicon mirror plate, self-supported coils, and permanent magnets were assembled with the printed part to provide a reflective surface and electromagnetic actuation. Two types of devices with different spring shapes were designed and tested. Modal analyses were performed for each model with different magnet combinations in the design phase. To optimize the 3D printing process, resin mixtures with various mixing ratios were tested. An optical scan angle of 8.98° has been obtained for model #1 printed with an ABS-like resin at 309 Hz and an input current of 0.2 Arms. For model #2 printed with a 9:1 mixture of ABS-like resin and B9R-2-Black resin, an optical scan angle of 6.04° at 356 Hz an input current of 0.2 Arms has been obtained. Spiral scan patterns with various modulation depths were generated using model #1.
中文翻译:
用于激光雷达应用的 3D 打印聚合物部件制造的电磁 2D 扫描微镜
在这项研究中,提出了一种使用三维 (3D) 打印工艺和手动组装制造的全向扫描微镜。扫描微镜的核心部分采用基于数字光处理的还原聚合用光固化树脂印刷。外部制造的 6 毫米直径镀铝硅镜板、自支撑线圈和永磁体与印刷部件组装在一起,以提供反射表面和电磁驱动。设计并测试了两种具有不同弹簧形状的装置。在设计阶段对具有不同磁体组合的每个模型进行了模态分析。为了优化 3D 打印过程,我们测试了各种混合比例的树脂混合物。光学扫描角度为 8。 Hz 和 0.2 A rms的输入电流。对于用 9:1 的 ABS 类树脂和 B9R-2-Black 树脂混合物打印的模型 #2,在 356 Hz 下的光学扫描角为 6.04°, 输入电流为 0.2 A rms。使用模型#1 生成具有各种调制深度的螺旋扫描图案。