Grain size has significant effects on dielectric and ferroelectric properties of ferroelectric thin film for capacitors applications. In present work, lead-free (Bi_0.5Na_0.5)_0.94Ba_0.06TiO₃ (BNT-6BT) films with different grain size were deposited on LSMO/Pt(111)/Ti/SiO₂/Si(100) substrates by modulating the deposition temperature via pulsed laser deposition (PLD). The structure and grain size with rising deposition temperature were investigated by grazing-angle incidence X-ray diffractometer (GIXRD) and field emission scanning electron microscope (FESEM). Films with pseudocubic structure and average grain sizes variation from 46.5 to 106.0 nm were obtained. The dielectric and ferroelectric properties increase with the average size initially from 46.5 to 106.0 nm and then decrease slightly with a lightly degraded grain size as increasing deposition temperature. The enhanced values of P_max, P_r, and ε_r with 35.27 µC/cm², 13.98 µC/cm² and 568 at 1 kHz, respectively, are obtained in BNT-6BT films with the average grain size of 106.0 nm. Of particular importance is that BNT-6BT films with appropriate grain size possess superior frequency and anti-fatigue stabilities of ferroelectric properties. The results provide important guidance on the meticulous design of the electrical properties of the BNT-6BT films.

晶粒尺寸对电容器应用的铁电薄膜的介电和铁电性能有显着影响。_{本工作在LSMO/Pt(111)/Ti/SiO 2}上沉积了不同粒径的无铅(Bi _0.5 Na _0.5 ) _0.94 Ba _0.06 TiO _{3 (BNT-6BT)薄膜。}/Si(100) 基板通过脉冲激光沉积 (PLD) 调制沉积温度。采用掠角入射X射线衍射仪（GIXRD）和场发射扫描电子显微镜（FESEM）研究了随着沉积温度升高的组织和晶粒尺寸。获得了具有假立方结构和平均晶粒尺寸从 46.5 到 106.0 nm 变化的薄膜。介电和铁电性能随着平均尺寸的增加而增加，最初从 46.5 到 106.0 nm，然后随着沉积温度的升高随着晶粒尺寸的轻微降低而略有下降。P _max、P _r和ε _r的增强值分别为35.27 µC/cm ²、13.98 µC/cm ²在平均晶粒尺寸为 106.0 nm 的 BNT-6BT 薄膜中分别获得了 1 kHz 和 568 个。特别重要的是具有适当晶粒尺寸的BNT-6BT薄膜具有优异的频率和铁电性能的抗疲劳稳定性。研究结果为精细设计BNT-6BT薄膜的电性能提供了重要指导。