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Fabrication of nanocrystalline Ga2O3-NiO heterojunctions for large-area low-dose X-ray imaging
Applied Surface Science ( IF 6.3 ) Pub Date : 2022-08-25 , DOI: 10.1016/j.apsusc.2022.154623
Zhipeng Zhang , Manni Chen , Runze Zhan , Huanjun Chen , Kai Wang , Shaozhi Deng , Jun Chen

The Ga2O3 photoconductor possesses a wide bandgap, a relatively large density and a high absorption coefficient for low-energy X-ray. Therefore, it is expected to realize a highly sensitive low-energy X-ray detector. Realizing p-n heterojunctions using Ga2O3 thin film is essential for large-area low-dose X-ray imaging. Here, a p-n diode consisting of nanocrystalline Ga2O3 thin film and NiO thin film is successfully prepared by electron beam evaporation, exhibiting a large current rectification ratio of 6.0 × 104. The p-n heterojunction shows a large valence band offset of 1.7 eV, a large conduction band offset of 0.84 eV and a built-in potential of 0.2 eV near the interfacial region, benefiting for separation and migration of photogenerated carriers. In addition, the photoconductive gain mechanism of Ga2O3/NiO heterojunction based X-ray detectors with optimized NiO thickness is investigated, achieving a high internal gain (3.3 × 103), a high sensitivity (3.4 × 104 μCGyair−1 cm−2), a low detection limit (42 μGyair s−1) and a short response time (2.2 ms). The optimized detectors with 10 × 10 pixels show a uniform X-ray response, demonstrating their promising use in large-area X-ray imaging applications.



中文翻译:

制备用于大面积低剂量 X 射线成像的纳米晶 Ga2O3-NiO 异质结

Ga 2 O 3光电导体具有宽带隙、较大的密度和对低能X射线的高吸收系数。因此,有望实现高灵敏度的低能X射线探测器。使用 Ga 2 O 3薄膜实现 pn 异质结对于大面积低剂量 X 射线成像至关重要。在这里,通过电子束蒸发成功制备了由纳米晶Ga 2 O 3薄膜和NiO薄膜组成的pn二极管,具有6.0×10 4的大电流整流比。. pn异质结具有1.7 eV的大价带偏移、0.84 eV的大导带偏移和0.2 eV的内建电位,有利于光生载流子的分离和迁移。此外,研究了具有优化NiO厚度的基于Ga 2 O 3 /NiO异质结的X射线探测器的光电导增益机制,实现了高内部增益(3.3 × 10 3)、高灵敏度(3.4 × 10 4 μCGy air - 1 cm -2),低检测限(42 μGy air s -1) 和较短的响应时间 (2.2 ms)。具有 10 × 10 像素的优化探测器显示出均匀的 X 射线响应,证明了它们在大面积 X 射线成像应用中的应用前景。

更新日期:2022-08-26
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