用于设计和制造柔性触觉电子皮肤传感器的飞秒激光诱导超金属,ACS Applied Materials & Interfaces

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用于设计和制造柔性触觉电子皮肤传感器的飞秒激光诱导超金属
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2022-08-11 , DOI: 10.1021/acsami.2c08835
Chengjun Zhang ₁ , Zhikang Li ₁ , Haoyu Li ₂ , Qing Yang ₁ , Hao Wang ₁ , Chao Shan ₂ , Jingzhou Zhang ₂ , Xun Hou ₂ , Feng Chen ₂

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在实际应用中迫切需要追求具有优异综合性能的柔性触觉电子皮肤传感器。然而，目前的柔性触觉电子皮肤传感器存在柔韧性和灵敏度不足、制造成本高、效率低、传感性能易受污染等问题。在这里，展示了一种高灵敏度的全柔性触觉传感器 (AFTS)，它具有电容传感，它结合了双面微金字塔介电层和液态金属 (LM) 电极。基于 LM 的 AFTS 的设计和制造基于飞秒激光诱导的超金属疏。超金属微金字塔导致高达 2.78 kPa ^{–1的高灵敏度}，超低检测限~3 Pa，快速响应时间为80 ms，循环载荷超过10 000次的优异耐久性。所使用的飞秒激光器可以实现可编程、高效、低成本和大规模制造超金属双侧微锥体，这是使用传统技术难以实现的。此外，外部基板经过飞秒激光处理，使AFTS在高湿环境下具有出色的防污性能和稳定的传感信号。对人体生理和运动信号的成功监测证明了我们开发的 AFTS 在可穿戴生物监测应用中的潜力。

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Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

Pursuing flexible tactile electronic skin sensors with superior comprehensive performances is highly desired in practical applications. However, current flexible tactile electronic skin sensors suffer insufficient flexibility and sensitivity, as well as high-cost and low-efficiency in fabrication, and are susceptible to contamination in sensing performances. Here, a highly sensitive all-flexible tactile sensor (AFTS) is presented with capacitive sensing that combines a double-side micropyramids dielectric layer and a liquid metal (LM) electrode. The design and fabrication of LM-based AFTS are based on supermetalphobicity induced by femtosecond laser. The supermetalphobic micropyramids lead to a high sensitivity up to 2.78 kPa^–1, an ultralow limit of detection of ∼3 Pa, a fast response time of 80 ms, and an excellent durability of cyclic load over 10 000 times. The used femtosecond laser enables programmable, high-efficiency, low-cost, and large-scale fabrication of supermetalphobic double-side micropyramids, which is difficult to implement using conventional techniques. Furthermore, the outer substrates are treated by a femtosecond laser, endowing the AFTS with excellent antifouling performance and stable sensing signals in the highly humid environment. Successful monitoring of human physiological and motion signals demonstrates the potential of our developed AFTS for wearable biomonitoring applications.

更新日期：2022-08-11

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