Microsystems & Nanoengineering ( IF 7.3 ) Pub Date : 2022-07-08 , DOI: 10.1038/s41378-022-00414-x Li Yang 1 , Guanghao Zheng 2 , Yaoqian Cao 3 , Chuizhou Meng 2 , Yuhang Li 4 , Huadong Ji 2 , Xue Chen 5 , Guangyu Niu 6 , Jiayi Yan 2 , Ye Xue 1 , Huanyu Cheng 7
The accurate, continuous analysis of healthcare-relevant gases such as nitrogen oxides (NOx) in a humid environment remains elusive for low-cost, stretchable gas sensing devices. This study presents the design and demonstration of a moisture-resistant, stretchable NOx gas sensor based on laser-induced graphene (LIG). Sandwiched between a soft elastomeric substrate and a moisture-resistant semipermeable encapsulant, the LIG sensing and electrode layer is first optimized by tuning laser processing parameters such as power, image density, and defocus distance. The gas sensor, using a needlelike LIG prepared with optimal laser processing parameters, exhibits a large response of 4.18‰ ppm−1 to NO and 6.66‰ ppm−1 to NO2, an ultralow detection limit of 8.3 ppb to NO and 4.0 ppb to NO2, fast response/recovery, and excellent selectivity. The design of a stretchable serpentine structure in the LIG electrode and strain isolation from the stiff island allows the gas sensor to be stretched by 30%. Combined with a moisture-resistant property against a relative humidity of 90%, the reported gas sensor has further been demonstrated to monitor the personal local environment during different times of the day and analyze human breath samples to classify patients with respiratory diseases from healthy volunteers. Moisture-resistant, stretchable NOx gas sensors can expand the capability of wearable devices to detect biomarkers from humans and exposed environments for early disease diagnostics.
中文翻译:
基于激光诱导石墨烯的防潮、可拉伸氮氧化物气体传感器,用于环境监测和呼吸分析
对于低成本、可伸缩的气体传感设备,在潮湿环境中准确、连续地分析氮氧化物 (NO x )等医疗保健相关气体仍然难以实现。本研究介绍了基于激光诱导石墨烯 (LIG) 的防潮、可拉伸 NOx 气体传感器的设计和演示。LIG 传感和电极层夹在柔软的弹性体基板和防潮半透性密封剂之间,首先通过调整功率、图像密度和散焦距离等激光加工参数进行优化。该气体传感器使用以最佳激光加工参数制备的针状 LIG,显示出对 NO 4.18‰ ppm -1和对 NO 2 6.66‰ ppm -1的大响应、NO 8.3 ppb 和 NO 2 4.0 ppb 的超低检测限、快速响应/恢复和出色的选择性。LIG 电极中可拉伸蛇形结构的设计以及与刚性岛的应变隔离使气体传感器可拉伸 30%。结合相对湿度为 90% 的防潮特性,所报告的气体传感器进一步被证明可以在一天中的不同时间监测个人局部环境,并分析人类呼吸样本,以将呼吸系统疾病患者与健康志愿者进行分类。防潮、可拉伸的 NOx气体传感器可以扩展可穿戴设备的能力,以检测来自人体和暴露环境的生物标志物,以进行早期疾病诊断。