Hydrophilic photocatalytically active ZnO and ZnO thin films doped with Yb₂O₃ and Eu₂O₃ (rare earth metal oxide, REM) with optical transmittance exceeding 76% in the visible light range (λ = 550 nm) were prepared by a combination of sol–gel technique, spin-coating and high temperature thermal treatment at 500 and 600 °C. The thin films were tested using advanced research methods, i.e.: morphology and topography and fractures along with approximate thickness values were investigated on scanning electron microscope (SEM), chemical composition was determined using X-ray Energy Dispersive Spectroscopy (X-ray Energy Spectroscopy), topography and roughness were measured on atomic force microscope (AFM), water contact angle values were determined by sitting water droplet method, optical properties of the fabricated materials were investigated using UV/Vis spectrophotometer. The decolorization efficiency of rhodamine B in aqueous solution was analyzed over a period of 190 min, obtaining degradation rates of: 54.7% and 43.1%, for ZnO and ZnO coatings doped with ytterbium oxide and europium oxide, respectively. The roughness of thin hybrid coatings did not exceed 50 nm, ensuring effective absorption of electromagnetic radiation by the layers. The methodology presented by the authors for the fabrication of thin hybrid films characterized by the key properties of self-cleaning coatings can be successfully applied to coatings of photovoltaic panels and architectural glass structures.