卷对卷纳米压印光刻中卷绕对纳米压印表面的影响,Polymer Engineering and Science

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卷对卷纳米压印光刻中卷绕对纳米压印表面的影响
Polymer Engineering and Science ( IF 3.2 ) Pub Date : 2022-06-10 , DOI: 10.1002/pen.26048
Manogna Jambhapuram ₁ , James K. Good ₁ , Aurélie Azoug ₁

Affiliation

卷对卷制造旨在将紫外线和热固化纳米压印光刻（UV-NIL、T-NIL）扩大到商业生产速度和产量。卷绕是存储大量纳米压印网状物的唯一便捷方式，因为它们在具有不同传输速度的顺序 R2R 过程中等待展开。在生产速度下，当压印卷筒纸进入收卷机时，压印树脂仍在发生化学变化，这种现象称为暗固化。不同固化阶段的粘弹性树脂在接触压力下因缠绕而变形。本研究关注接触压力对压印峰高的影响以及纳米压印表面的潜在功能。我们开发了压印卷筒纸缠绕的多尺度数值模型。首先表征树脂随时间变化的特性，结合暗固化和粘弹性对时间相关特性的影响。其次，压印网的有限元模型使用树脂机械性能来确定压印网的有效性能。最后，缠绕模型确定了缠绕辊中印记的压力和产生的应变。表面蠕变被量化。该预测将确定压印材料应如何缠绕以及缠绕多长时间。卷绕模型决定了卷绕卷中印记的压力和产生的应变。表面蠕变被量化。该预测将确定压印材料应如何缠绕以及缠绕多长时间。卷绕模型决定了卷绕卷中印记的压力和产生的应变。表面蠕变被量化。该预测将确定压印材料应如何缠绕以及缠绕多长时间。

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Impact of winding on nanoimprinted surfaces in roll-to-roll nanoimprint lithography

Roll-to-Roll manufacturing aims at scaling ultraviolet- and thermally cured nanoimprint lithography (UV-NIL, T-NIL) to commercial production speeds and volumes. Winding is the only convenient way of storing large quantities of nanoimprinted webs as they await unwinding in sequential R2R processes with distinct transport speeds. At production speeds, the imprinted resin is still chemically evolving when the imprinted web enters the winder, through a phenomenon called dark curing. The viscoelastic resin at various curing stages deforms under the contact pressure due to winding. This study is concerned with the impact of the contact pressure on the imprinted peak heights and potentially the functionality of the nanoimprinted surface. We develop a multiscale numerical model of the winding of the imprinted web. First the evolving properties of the resin through time are characterized, combining the effect of dark curing and viscoelasticity on the time-dependent properties. Second, a finite element model of the imprinted web uses the resin mechanical properties to determine the effective properties of the imprinted web. Finally, the winding model determines the pressure and resulting strain of the imprints in the wound roll. The surface creep is quantified. This prediction will establish how and how long the imprinted materials should be wound.

更新日期：2022-06-10

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