AbstractHigh-entropy oxides (HEO) with entropic stabilization and compositional flexibility have great potential application in batteries and catalysis. In this work, HEO thin films were synthesized by pulsed laser deposition (PLD) from a rock-salt (Co0.2Ni0.2Cu0.2Mg0.2Zn0.2)O ceramic target. The films exhibited the target’s crystal structure, were chemically homogeneous, and possessed a three-dimensional (3D) island morphology with connected randomly shaped nanopores. The effects of varying PLD laser fluence on crystal structure and morphology were explored systematically. Increasing fluence facilitates film crystallization at low substrate temperature (300 °C) and increases film thickness (60–140 nm). The lateral size of columnar grains, islands (19 nm to 35 nm in average size), and nanopores (9.3 nm to 20 nm in average size) increased with increasing fluence (3.4 to 7.0 J/cm2), explained by increased kinetic energy of adatoms and competition between deposition and diffusion. Additionally, increasing fluence reduces the number of undesirable droplets observed on the film surface. The nanoporous HEO films can potentially serve as electrochemical reaction interfaces with tunable surface area and excellent phase stability. Graphical abstract

中文翻译：

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脉冲激光沉积法生长纳米多孔高熵氧化物薄膜

摘要 具有熵稳定性和成分灵活性的高熵氧化物（HEO）在电池和催化领域具有巨大的应用潜力。在这项工作中，通过脉冲激光沉积 (PLD) 从岩盐 (Co0.2Ni0.2Cu0.2Mg0.2Zn0.2)O 陶瓷靶材合成 HEO 薄膜。薄膜表现出目标的晶体结构，化学均质，并具有三维 (3D) 岛状形态，具有连接的随机形状的纳米孔。系统地探讨了不同PLD激光能量密度对晶体结构和形态的影响。增加能量密度有助于在低衬底温度（300 °C）下薄膜结晶并增加薄膜厚度（60-140 nm）。柱状晶粒、岛（平均尺寸为 19 nm 至 35 nm）和纳米孔（9. 平均尺寸为 3 nm 到 20 nm）随着能量密度的增加（3.4 到 7.0 J/cm2）而增加，这可以通过吸附原子的动能增加以及沉积和扩散之间的竞争来解释。此外，增加能量密度会减少在薄膜表面观察到的不希望的液滴数量。纳米多孔 HEO 薄膜可以作为具有可调表面积和优异相稳定性的电化学反应界面。图形概要