This letter presents a nanowatt-level detector-first wakeup receiver using microelectromechanical system (MEMS)-based matching network (MN). The aluminum nitride (AlN) piezoelectric MEMS resonator is utilized to implement the impedance MN for high passive gain to improve the receiver sensitivity. The high- QQ MEMS-based MN also greatly improves the receiver’s out-of-band interference rejection. Gate-biased envelope detector (ED) with small input capacitance is used for RF-to-baseband direct conversion. The wakeup receiver is implemented in a 180-nm CMOS process. It obtains −57-dBm sensitivity with 1-kbps ON-OFF keying (OOK) data rate at 789 MHz while consuming only 16-nW power consumption.

中文翻译：

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使用基于 MEMS 的匹配网络的 16nW-57dBm 灵敏度唤醒接收器


这封信介绍了一种使用基于微机电系统 (MEMS) 的匹配网络 (MN) 的纳瓦级探测器优先唤醒接收器。利用氮化铝（AlN）压电MEMS谐振器来实现阻抗MN以获得高无源增益，以提高接收器灵敏度。基于高 QQ MEMS 的 MN 还大大提高了接收器的带外干扰抑制能力。具有小输入电容的栅极偏置包络检波器 (ED) 用于射频到基带的直接转换。唤醒接收器采用 180 nm CMOS 工艺实现。它在 789 MHz 下以 1 kbps 开关键控 (OOK) 数据速率获得 −57 dBm 灵敏度，同时仅消耗 16 nW 功耗。