腔室/退火温度对 Zr:HfO2 铁电电容器耐久特性的影响,Sensors

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腔室/退火温度对 Zr:HfO2 铁电电容器耐久特性的影响
Sensors ( IF 3.4 ) Pub Date : 2022-05-27 , DOI: 10.3390/s22114087
Yejoo Choi ₁ , Changwoo Han ₁ , Jaemin Shin ₂ , Seungjun Moon ₁ , Jinhong Min ₃ , Hyeonjung Park ₁ , Deokjoon Eom ₄ , Jehoon Lee ₄ , Changhwan Shin ₅

Affiliation

研究了在原子层沉积 (ALD) 工艺中在不同沉积/退火温度下制造的 Zr 掺杂 HfO ₂ (HZO) 基金属-铁电-金属 (MFM) 电容器的耐久性特性。ALD工艺中的腔室温度设置为120°C、200°C或250°C，退火温度设置为400°C、500°C、600°C或700°C。^{对于给定的 700 ° C}退火温度，剩余极化 (2P r ⁾_在120 °C、 ²⁰⁰ °C 和250°C，分别。对于给定/相同的退火温度，最大剩余极化（P _r) 是在使用 250 °C 的腔室温度时实现的。在较高的退火温度下，HZO层中的晶粒尺寸变小，从而能够提高P _r。据观察，在各种退火/腔室温度下制造的电容器的耐久性特性完全不同。不同的耐力特性是由于铁电薄膜中的氧和氧空位影响唤醒/疲劳行为。然而，一般来说，所有电容器在外部施加的脉冲（高达 10 ⁸个脉冲周期）下都没有击穿。

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Impact of Chamber/Annealing Temperature on the Endurance Characteristic of Zr:HfO2 Ferroelectric Capacitor

The endurance characteristic of Zr-doped HfO₂ (HZO)-based metal–ferroelectric–metal (MFM) capacitors fabricated under various deposition/annealing temperatures in the atomic layer deposition (ALD) process was investigated. The chamber temperature in the ALD process was set to 120 °C, 200 °C, or 250 °C, and the annealing temperature was set to 400 °C, 500 °C, 600 °C, or 700 °C. For the given annealing temperature of 700 °C, the remnant polarization (2P_r) was 17.21 µC/cm², 26.37 µC/cm², and 31.8 µC/cm² at the chamber temperatures of 120 °C, 200 °C, and 250 °C, respectively. For the given/identical annealing temperature, the largest remnant polarization (P_r) was achieved when using the chamber temperature of 250 °C. At a higher annealing temperature, the grain size in the HZO layer becomes smaller, and thereby, it enables to boost up P_r. It was observed that the endurance characteristics for the capacitors fabricated under various annealing/chamber temperatures were quite different. The different endurance characteristics are due to the oxygen and oxygen vacancies in ferroelectric films, which affects the wakeup/fatigue behaviors. However, in common, all the capacitors showed no breakdown for an externally applied pulse (up to 10⁸ cycles of the pulse).

更新日期：2022-05-28

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