使用具有快速响应时间和芯片级设计的微型热电发电机进行连续医疗保健监测的可穿戴式呼吸传感器,Advanced Materials Technologies

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使用具有快速响应时间和芯片级设计的微型热电发电机进行连续医疗保健监测的可穿戴式呼吸传感器
Advanced Materials Technologies ( IF 6.4 ) Pub Date : 2022-02-09 , DOI: 10.1002/admt.202101416
Yuedong Yu ₁ , Wei Zhu _{2,

3,

4} , Jie Zhou ₁ , Zhanpeng Guo ₁ , Yutong Liu ₁ , Yuan Deng _{2,

3}

Affiliation

热电发电机 (TEG) 可作为出色的无源可穿戴传感器，用于监测人体热量。然而，实时和全时呼吸监测以预测和诊断呼吸相关疾病，需要具有芯片级尺寸、快速响应和高稳定响应度的微 TEG（μTEG）。在这项研究中，通过结合用于快速热传导的超薄垂直结构和用于瞬态响应和高填充率的水平高集成密度，精心设计了一种薄膜紧凑型μ TEG。该器件与 28 对微热电 (TE) 支腿集成在氮化铝 (AlN) 基板上，该基板使用超快激光直写和嵌入式底部触点和 TE 支腿进行图案化。所提出的μ的这种独特设计TEG 提供 8 ms 的快速响应和 1.9 mm × 2.7 mm × 400 μm的芯片级尺寸，易于佩戴。此外，通过将μTEG安装在鼻孔下方和嘴巴附近，展示了实时呼吸监测的应用场景。记录的气流信号精确显示，具有区分鼻子和嘴呼吸的独特特征。因此，该研究提出了一种用于实时和全时人体生理信号采集的微妙且可穿戴的呼吸传感器。

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Wearable Respiration Sensor for Continuous Healthcare Monitoring Using a Micro-Thermoelectric Generator with Rapid Response Time and Chip-Level Design

Thermoelectric generators (TEG) serve as excellent passive wearable sensors for monitoring human body heat. However, a micro-TEG (μTEG) with chip-level size, rapid response, and high and stable responsivity is desired for real-time and full-time respiration monitoring to predict and diagnose breath-related diseases. In this study, a thin-film compact μTEG is elaborately designed by combining an ultrathin vertical structure for rapid heat conduction and a horizontal high-integration density for transient response and a high filling rate. The device integrated with 28-pair micro thermoelectric (TE) legs is fabricated on an aluminum nitride (AlN) substrate, which is patterned using ultrafast laser direct writing with embedded bottom contacts and TE legs. This unique design of the proposed μTEG provides a rapid response of 8 ms and chip-level size of 1.9 mm × 2.7 mm × 400 μm for easy wearability. Additionally, application scenarios of real-time respiration monitoring are demonstrated by mounting the μTEG under the nostril and near the mouth. The recorded airflow signals are displayed precisely with distinct features separating the nose and mouth breathing. Thus, the study presents a subtle and wearable respiration sensor for real-time and full-time human physiological signal acquisition.

更新日期：2022-02-09

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