A series of TiO₂-SiO₂ composite sols have been synthesized using titanium (IV) isopropoxide and tetraethyl orthosilicate as precursors under acidic conditions. The stability of the binary sols is improved by a prehydrolysis step of tetraethyl orthosilicate. Assisted by heat treatment, the refractive index of the TiO₂-SiO₂ hybrid films obtained can be tuned in a wide range. On the basis of film optical constants derived from fitting of transmittance spectrum, two types of antireflection coatings with quarter-half and quarter-half-quarter multilayer structures are designed, and ordered mesoporous SiO₂ film and dense SiO₂ film are proposed to be used as the top layer, respectively. According to theoretical design requirements, the two antireflection coatings are successfully constructed by selecting the TiO₂-SiO₂ films with appropriate refractive index as the other layers. The average transmittance of the triple-layer coating at 400–800 nm is 98.74%, and that of the double-layer coating even reaches 99%. Meanwhile, the two types of multilayer coatings show good mechanical properties, which benefit from the tough skeleton of each layer. X-ray reflectivity measurements were also performed on the multilayer structures and the obtained thickness of each layer is consistent with that in the theoretical design. The results show that precise control of film thickness and refractive index is achievable using sol-gel techniques. Owing to excellent control on sol composition, the practical sol-gel route has high potential for the production of antireflective coatings.

以异丙醇钛（IV）和原硅酸四乙酯为前驱体，在酸性条件下合成了一系列TiO ₂ -SiO _{2复合溶胶。}二元溶胶的稳定性通过原硅酸四乙酯的预水解步骤得到改善。在热处理的辅助下，得到的TiO ₂ -SiO ₂杂化薄膜的折射率可以在很宽的范围内调节。基于透射光谱拟合得到的薄膜光学常数，设计了1/4和1/4多层结构的两种增透膜，有序介孔SiO ₂薄膜和致密SiO _{2 。}建议将薄膜分别用作顶层。根据理论设计要求，通过选择TiO ₂ -SiO _{2成功构建了两种增透膜。}具有适当折射率的薄膜作为其他层。三层镀膜在400~800 nm处的平均透光率为98.74%，双层镀膜的透光率甚至达到99%。同时，这两种多层涂层均表现出良好的力学性能，这得益于每一层的坚韧骨架。还对多层结构进行了 X 射线反射率测量，得到的每层厚度与理论设计一致。结果表明，使用溶胶-凝胶技术可以实现对薄膜厚度和折射率的精确控制。由于对溶胶成分的出色控制，实用的溶胶-凝胶路线在生产抗反射涂层方面具有很高的潜力。