A chemical solution deposition route based on the chelate approach is developed for the synthesis of Ba_0.85Ca_0.15Zr_0.1Ti_0.9O₃ thin films. This lead-free composition is regarded as one of the most promising for the replacement of Pb(Zr_xTi_1−x)O₃ in practical applications. The synthesis method replaces the highly toxic 2-methoxyethanol route, and offers the advantage of a simple and rapid preparation process. Homogeneous and crack-free thin films with thicknesses of 290 and 490 nm were prepared. Films annealed between 700 and 900 °C develop a single-phase perovskite structure. The electrical properties exhibit a weak frequency dependence for the dielectric constant, low dielectric loss, and ferroelectric behavior.

开发了一种基于螯合方法的化学溶液沉积路线，用于合成 Ba _0.85 Ca _0.15 Zr _0.1 Ti _0.9 O ₃薄膜。这种无铅组合物被认为是最有希望替代 Pb(Zr _x Ti _1-x )O _{3 的组合物之一}在实际应用中。该合成方法取代了剧毒的2-甲氧基乙醇路线，具有制备过程简单快速的优点。制备了厚度为 290 和 490 nm 的均匀无裂纹薄膜。在 700 到 900 °C 之间退火的薄膜会形成单相钙钛矿结构。电性能对介电常数、低介电损耗和铁电行为表现出弱的频率依赖性。