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Crystal growth and design of Sn-doped β-Ga2O3: Morphology, defect and property studies of cylindrical crystal by EFG
Journal of Alloys and Compounds ( IF 5.8 ) Pub Date : 2021-11-24 , DOI: 10.1016/j.jallcom.2021.162830
Bo Fu 1, 2 , Guangzhong Jian 3 , Wenxiang Mu 1, 2 , Yang Li 1 , Huanyang Wang 1 , Zhitai Jia 1, 4 , Yanbin Li 4, 5 , Shibing Long 3 , Yujun Shi 6 , Xutang Tao 1, 2
Affiliation  

The cylindrical Sn: β-Ga2O3 crystal with high crystalline quality was successfully designed and grown by the innovative edge-defined film-fed growth (EFG) method equipped with a cylindrical Iridium die. The challenges for the growth of Sn: β-Ga2O3 crystals were overcome by optimizing the design of an afterheater. The growth morphology of cylindrical β-Ga2O3 crystal was studied using a theoretical model and the results from experimental crystal growth. The order of importance of growth conditions affecting β-Ga2O3 crystal growth morphology was examined, based on the morphological features of cylindrical β-Ga2O3 crystals obtained by the EFG and Czochralski methods. The iridium inclusions with three shapes were observed in bulk β-Ga2O3 crystal, and the formation mechanism was carefully discussed. The optical bandgap and valence band maximum (VBM) of Sn: β-Ga2O3 crystal were calculated to be 4.74 eV and 3.49 eV by absorption spectra and X-ray photoelectron spectroscopy (XPS), respectively. The corresponding surface barrier height (Φsurf) was 1.25 eV. The carrier concentration of 5.95 × 1018 cm−3 was characterized by capacitance-voltage (C-V) measurement. By the Hall measurement, the carrier mobility and resistivity were estimated to be around 51 cm2 V−1 s−1 and 3.55 × 10–2 Ω cm, respectively.



中文翻译:

Sn掺杂β-Ga2O3的晶体生长和设计:通过EFG对圆柱晶体的形态、缺陷和性能进行研究

具有高结晶质量的圆柱形 Sn: β -Ga 2 O 3晶体通过配备圆柱形铱模具的创新边缘定义薄膜生长 (EFG) 方法成功设计和生长。通过优化后加热器的设计,克服了Sn: β -Ga 2 O 3晶体生长的挑战。使用理论模型和实验晶体生长的结果研究了圆柱形β- Ga 2 O 3晶体的生长形态。影响β -Ga 2 O 3的生长条件的重要性顺序基于通过 EFG 和 Czochralski 方法获得的圆柱形β -Ga 2 O 3晶体的形态特征,检查了晶体生长形态。在块状β- Ga 2 O 3晶体中观察到三种形状的铱夹杂物,并仔细讨论了其形成机制。通过吸收光谱和X射线光电子能谱(XPS)计算出Sn: β- Ga 2 O 3晶体的光学带隙和价带最大值(VBM)分别为4.74 eV和3.49 eV。对应的表面势垒高度(Φ surf) 为 1.25 eV。5.95 × 10 18 cm -3的载流子浓度通过电容-电压(CV)测量表征。通过霍尔测量,载流子迁移率和电阻率估计分别约为 51 cm 2 V -1 s -1和 3.55 × 10 –2 Ω cm。

更新日期:2021-12-04
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