用EFG法研究β-Ga2O3晶体中的蓝色中心,CrystEngComm

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用EFG法研究β-Ga2O3晶体中的蓝色中心
CrystEngComm ( IF 2.6 ) Pub Date : 2021-10-21 , DOI: 10.1039/d1ce01078f
Bo Fu _{1,

2} , Wenxiang Mu _{1,

2} , Yang Li ₁ , Yujun Shi ₃ , Yanbin Li ₄ , Zhitai Jia _{1,

5} , Xutang Tao _{1,

2}

Affiliation

β 型氧化镓 (β-Ga ₂ O ₃ ) 因其在 4.9 eV 左右的宽带隙而作为透明导电氧化物 (TCO) 半导体的应用引起了极大的关注。然而，在某些情况下，通过边缘定义薄膜生长 (EFG) 方法无意掺杂的 β-Ga ₂ O ₃晶体会呈现蓝色，这使得它们作为 TCO 的应用成为一个挑战。在此，我们重点研究β-Ga ₂ O ₃中的蓝色中心EFG 生长的晶体。辉光放电质谱（GDMS）用于测量杂质浓度。X 射线衍射显示蓝色区域的晶格收缩。湿蚀刻方法用于证明蚀刻坑的密度。来自阴极发光（CL）的高强度蓝色发射证明蓝色区域中存在足够数量的空位。X 射线光电子能谱 (XPS) 分析表明，Ga ^I 3d (Ga ⁺ ) 丰富地存在于蓝色区域。透射光谱结合电容-电压 (C-V) 测量提供了证据，表明从 UV 到 NIR 具有较低透射率的蓝色区域更具有导电性。Ga ^I 3d (Ga ⁺) 引起的空位被推测为蓝色中心。在氧气气氛中通过高温退火可以去除蓝色色心。

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Investigation of the blue color center in β-Ga2O3 crystals by the EFG method

Beta-type gallium oxide (β-Ga₂O₃) has attracted enormous attention for application as a transparent conductive oxide (TCO) semiconductor due to its wide bandgap at around 4.9 eV. However, unintentionally doped β-Ga₂O₃ crystals by the edge-defined film-fed growth (EFG) method have blue coloration in some cases, making their application as TCO a challenge. Herein, we focus on the investigation of the blue color center in β-Ga₂O₃ crystals grown by EFG. Glow discharge mass spectrometry (GDMS) was used to measure the impurity concentrations. X-ray diffraction revealed contraction of the crystal lattice in the blue area. The wet etching method was used to demonstrate the density of etch pits. The blue emission with high intensity from cathodoluminescence (CL) proved the existence of a sufficient number of vacancies in the blue area. X-ray photoelectron spectroscopy (XPS) analysis showed that Ga^I3d (Ga⁺) abounded in the blue area. Transmission spectroscopy combined with capacitance–voltage (C–V) measurement provided evidence that the blue area with lower transmittance from UV to NIR was more conductive. Ga^I3d (Ga⁺) induced by vacancies was speculated to be the blue color center. The blue color center can be removed by high-temperature annealing in an oxygen atmosphere.

更新日期：2021-11-11

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