基于苯并环丁烯的聚合物的喷墨印刷作为用于电子应用的低 k 材料,ACS Omega

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基于苯并环丁烯的聚合物的喷墨印刷作为用于电子应用的低 k 材料
ACS Omega ( IF 3.7 ) Pub Date : 2021-06-10 , DOI: 10.1021/acsomega.1c01488
Filippo Iervolino ₁ , Raffaella Suriano ₁ , Martina Scolari ₂ , Ilaria Gelmi ₂ , Laura Castoldi ₂ , Marinella Levi ₁

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具有低介电常数的聚合物材料由于其特性而广泛用于电子工业。特别是，聚合物粘合剂可用于许多应用，例如晶片键合和三维集成。苯并环丁烯 (BCB) 是一种非常有趣的材料，因为它具有出色的粘合性能和介电性能。通常，BCB 是通过旋涂施加的，尽管这种技术不允许制造复杂的图案。要获得复杂的图案，就必须使用印刷技术，例如喷墨印刷。然而，尚未研究基于 BCB 的油墨的喷墨印刷。在这里，我们展示了使用基于 BCB 的墨水打印复杂图案的可行性，分辨率达到 130 μm。我们证明，通过适当的稀释，基于 BCB 的墨水进入可印刷性窗口，并且在不形成卫星液滴的情况下实现液滴喷射。此外，我们还介绍了出现咖啡环效应的条件。与基材相互作用太高的油墨更有可能表现出咖啡环效应，从而降低印刷质量。我们还观察到，由于 BCB 基聚合物的重新溶解有助于消除可能的不均匀性，因此可以通过增加印刷层数来实现更好的薄膜均匀性。我们的工作代表了使用喷射印刷技术深入研究基于 BCB 的聚合物制造的起点，

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Inkjet Printing of a Benzocyclobutene-Based Polymer as a Low-k Material for Electronic Applications

Polymeric materials with a low dielectric constant are widely used in the electronic industry due to their properties. In particular, polymer adhesives can be used in many applications such as wafer bonding and three-dimensional integration. Benzocyclobutene (BCB) is a very interesting material thanks to its excellent bonding behavior and dielectric properties. Usually, BCB is applied by spin-coating, although this technology does not allow the fabrication of complex patterns. To obtain complex patterns, it is necessary to use a printing technology, such as inkjet printing. However, inkjet printing of BCB-based inks has not yet been investigated. Here, we show the feasibility of printing complex patterns with a BCB-based ink, reaching a resolution of 130 μm. We demonstrate that with a proper dilution, BCB-based inks enter the printability window and drop ejection is achieved without the formation of satellite drops. In addition, we present the conditions in which there is an appearance of the coffee ring effect. Inks that feature a too high interaction with the substrate are more likely to show the coffee ring effect, deteriorating the printing quality. We also observe that it is possible to achieve a better film uniformity by increasing the number of printed layers, due to redissolution of the BCB-based polymer that helps to level possible inhomogeneities. Our work represents the starting point for an in-depth study of BCB-based polymer fabrication using jet printing technologies, as a comparison of the bonding quality obtained with different materials and different technologies could give more information and broaden the perspective regarding this field.

更新日期：2021-06-22

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