X射线光电子能谱表征氮离子辐照的多晶钨表面,MATERIALS TRANSACTIONS

当前位置： X-MOL 学术 › MATERIALS TRANSACTIONS › 论文详情

Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)

X射线光电子能谱表征氮离子辐照的多晶钨表面
MATERIALS TRANSACTIONS Pub Date : 2016-01-01 , DOI: 10.2320/matertrans.m2016107
Yoshitomo Kamiura ₁ , Kenji Umezawa ₁ , Yuden Teraoka ₂ , Akitaka Yoshigoe ₂

Affiliation

用离子束装置在室温下用2.5keV的两种氮离子̶N+和N2̶辐照多晶钨表面。使用SPring-8上的同步加速器辐射进行的X射线光电子能谱（XPS）实验的结果表明，用任何一种离子照射钨样品时，W 4f7 / 2和W的半峰全宽（FWHM） 4f5 / 2峰加宽，与WO3结合能相对应的35.8 eV和37.8eV̶处的峰略有增加；这表明在界面下方的次表面形成了氮化钨。氮离子束辐照后钨的N 1s光谱分解为四个组分峰。观察到这些组分峰的位置与标准氧氮化钨W0.62（N0.62O0.38）的位置相同，在X射线衍射分析中显示出W2N峰。在397.3 eV和398.1 eV处的主要分解峰分别归因于WN键和WNO键。397.3 eV处的N 1s峰与W 4f双重峰（对应于WN键）的强度比随逸出深度的变化，这是通过角度分辨XPS测量的，显然遵循正态分布。辐照样品。这表明用N 2离子辐照的钨表面的WN键密度高于用N +离子辐照的表面的WN键密度，并且表明N 2离子比N +离子渗透的深度略深。[doi：10.2320 / matertrans.M2016107] 397.3 eV处的N 1s峰与W 4f双重峰（对应于WN键）的强度比随逸出深度的变化，这是通过角度分辨XPS测量的，显然遵循正态分布。辐照样品。这表明用N 2离子辐照的钨表面的WN键密度高于用N +离子辐照的表面的WN键密度，并且表明N 2离子比N +离子渗透的深度略深。[doi：10.2320 / matertrans.M2016107] 397.3 eV处的N 1s峰与W 4f双重峰（对应于WN键）的强度比随逸出深度的变化，这是通过角度分辨XPS测量的，显然遵循正态分布。辐照样品。这表明用N 2离子辐照的钨表面的WN键密度高于用N +离子辐照的表面的WN键密度，并且表明N 2离子比N +离子渗透的深度略深。[doi：10.2320 / matertrans.M2016107] 这表明用N 2离子辐照的钨表面的WN键密度高于用N +离子辐照的表面的WN键密度，并且表明N 2离子比N +离子渗透的深度略深。[doi：10.2320 / matertrans.M2016107] 这表明用N 2离子辐照的钨表面的WN键密度高于用N +离子辐照的表面的WN键密度，并且表明N 2离子比N +离子渗透的深度略深。[doi：10.2320 / matertrans.M2016107]

"点击查看英文标题和摘要"

Characterization of Polycrystalline Tungsten Surfaces Irradiated with Nitrogen Ions by X-ray Photoelectron Spectroscopy

Polycrystalline tungsten surfaces were irradiated at room temperature with two kinds of nitrogen ions̶N+ and N2̶at 2.5 keV by using an ion beam apparatus. Results of X-ray photoelectron spectroscopy (XPS) experiments performed using synchrotron radiation at SPring-8 showed that upon irradiation of the tungsten sample with either kind of ion, the full widths at half maximum (FWHM) of the W 4f7/2 and W 4f5/2 peaks broadened and the peaks at 35.8 eV and 37.8 eV̶which correspond to WO3 binding energies̶increased slightly; this indicated the formation of tungsten nitride at the subsurface below the interface. The N 1s spectra of tungsten after nitrogen ion beam irradiation were decomposed into four component peaks. The positions of these component peaks were observed to be the same as those of the standard tungsten oxynitride W0.62(N0.62O0.38), which exhibited W2N peaks in X-ray diffraction analysis. The main decomposed peaks at 397.3 eV and 398.1 eV were attributed to W-N bonds and W-N-O bonds, respectively. The variation of the intensity ratio of the N 1s peak at 397.3 eV to the W 4f doublet peaks (corresponding to W-N bonds) as a function of the escape depth, which was measured by angle-resolved XPS, apparently followed a normal distribution for the irradiated samples. This indicates that the W-N bond density of the tungsten surface irradiated with N2 ions is higher than that of the surface irradiated with N+ ions and also that the N2 ions penetrate slightly deeper than the N+ ions. [doi:10.2320/matertrans.M2016107]

更新日期：2016-01-01

点击分享查看原文

点击收藏

公开下载