Electrically Tunable Surface Acoustic Wave Propagation at MHz Frequencies Based on Carbon Nanotube Thin‐Film Transistors,Advanced Functional Materials

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Electrically Tunable Surface Acoustic Wave Propagation at MHz Frequencies Based on Carbon Nanotube Thin‐Film Transistors
Advanced Functional Materials ( IF 18.5 ) Pub Date : 2021-02-25 , DOI: 10.1002/adfm.202010744
Chen Shen _{1,

2} , Shiheng Lu ₁ , Zhenhua Tian _{3,

4} , Shujie Yang ₃ , Jorge A. Cardenas ₁ , Junfei Li ₁ , Xiuyuan Peng ₁ , Tony Jun Huang ₃ , Aaron D. Franklin _{1,

5} , Steven A. Cummer ₁

Affiliation

Surface acoustic waves (SAWs) that propagate on the surface of a solid at MHz frequencies are widely used in sensing, communication, and acoustic tweezers. However, their properties are difficult to be tuned electrically, and current devices suffer from complicated configurations, complicated tuning mechanisms, or small ranges of tunability. Here a structure featuring a thin‐film transistor configuration is proposed to achieve electrically tunable SAW propagation based on conductivity tuning. When a DC gate voltage is applied, the on‐site conductivity of the piezoelectric substrate is modulated, which leads to velocity and amplitude tuning of SAWs. The use of carbon nanotubes and crystalline nanocellulose as the channel and gate materials results in high tuning capacity and low gate voltage requirement. The tunability is manifested by a 2.5% phase velocity tuning and near 10 dB on/off switching of the signals. The proposed device holds the potential for the next generation SAW‐based devices.

中文翻译：

基于碳纳米管薄膜晶体管的MHz频率下的电可调表面声波传播

以MHz频率在固体表面传播的表面声波（SAW）被广泛用于传感，通信和声学镊子中。然而，它们的特性难以电调谐，并且当前设备遭受复杂的配置，复杂的调谐机制或小的可调范围。在这里，提出了一种具有薄膜晶体管配置的结构，以基于电导率调节实现电可调的声表面波传播。当施加直流栅极电压时，压电基片的现场电导率被调制，这导致声表面波的速度和幅度调整。使用碳纳米管和晶体纳米纤维素作为沟道和栅极材料会导致较高的调谐能力和较低的栅极电压要求。可调性由2表示。5％的相位速度调整和接近10 dB的信号开/关切换。拟议的设备具有下一代基于SAW的设备的潜力。

更新日期：2021-05-04

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