Flexible pressure sensor has been increasingly recognized over the past several decades, but there is still a challenge to fabricate it with a superb sensitivity and large sensing range. Herein, a highly flexible, sensitive and capacitive pressure sensor based on a porous ionic membrane is developed. The innovative sensor contains a polyvinyl alcohol/potassium hydroxide (PVA/KOH) porous ionic dielectric layer and two indium tin oxide polyethylene terephthalate (ITO-PET) films, which are coated on the top and bottom of the dielectric layer, respectively. The sensing mechanism of the sensor is based on the electric double layer capacitors between ITO-PET electrodes and PVA/KOH membrane. By improving the deformability of such elastomer dielectric layer with micro-pores, the sensitivity is greatly enhanced and the detectable range of pressure is significantly widened. Comparing to traditional pressure sensor, the developed sensor provides a high sensitivity up to 20.83/kPa and rapid dynamic responses (50 ms) for pressure measurement. More importantly, the sensor is insensitive to the bending deformation and stable in a low temperature range. Furthermore, a capacitive sensor network is fabricated to measure the spatial pressure distribution and magnitude.

在过去的几十年中，柔性压力传感器已得到越来越多的认可，但要制造出具有超高灵敏度和大传感范围的柔性传感器仍然是一个挑战。本文中，开发了基于多孔离子膜的高度柔性，灵敏且电容性的压力传感器。该创新型传感器包含聚乙烯醇/氢氧化钾（PVA / KOH）多孔离子介电层和两个氧化铟锡聚对苯二甲酸乙二醇酯（ITO-PET）膜，它们分别涂覆在介电层的顶部和底部。传感器的感应机制基于ITO-PET电极与PVA / KOH膜之间的双电层电容器。通过改善这种具有微孔的弹性体介电层的可变形性，灵敏度大大提高，压力的可检测范围也大大拓宽了。与传统的压力传感器相比，开发的传感器可提供高达20.83 / kPa的高灵敏度以及用于压力测量的快速动态响应（50 ms）。更重要的是，该传感器对弯曲变形不敏感并且在低温范围内稳定。此外，制造了电容传感器网络以测量空间压力分布和大小。