High-Resolution and High-Sensitivity Flexible Capacitive Pressure Sensors Enhanced by a Transferable Electrode Array and a Micropillar–PVDF Film,ACS Applied Materials & Interfaces

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High-Resolution and High-Sensitivity Flexible Capacitive Pressure Sensors Enhanced by a Transferable Electrode Array and a Micropillar–PVDF Film
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2021-02-04 , DOI: 10.1021/acsami.0c23042
Zebang Luo ₁ , Jing Chen ₁ , Zhengfang Zhu ₁ , Lin Li ₁ , Yi Su ₁ , Wei Tang ₁ , Olatunji Mumini Omisore ₁ , Lei Wang _{1,

2} , Hui Li _{1,

2}

Affiliation

Flexible pressure sensors have attracted increasing attention because they can mimic human skin to sense external pressure; however, for mimicking human skin, the sensing of a pressure point is far from sufficient. To realize fully biomimetic skins, it is crucial for flexible sensors to have high resolution and high sensitivity. We conducted simulations and experiments to determine the relationship between the sensor sensitivity and physical parameters, such as the effective relative permittivity and air ratio of the dielectric layer. According to the results, a micropillar–poly(vinylidene fluoride) (PVDF) dielectric layer was designed to achieve high sensitivity (0.43 kPa^–1) in the low-pressure regime (<1 kPa). An 8 × 8 pixel sensor matrix was prepared based on a micropillar–PVDF (MP) film and electrode array (MPEA) to detect the pressure distribution with high resolution (13 dpi). Each pixel could reflect the point of applied pressure through an obvious change in the relative capacitance; moreover, objects with various geometries could be mapped by the pixels of the flexible sensor. A counterweight, a plastic flag, and pine leaves were placed on the flexible sensor, and the shapes were successfully mapped; in particular, the mapping of the ∼0.005 g ultra-lightweight pine leaves with a length of 7 mm and a width of 0.6 mm shows the high sensitivity and high resolution of our flexible pressure sensor.

中文翻译：

可转移电极阵列和微柱–PVDF薄膜增强了高分辨率和高灵敏度柔性电容式压力传感器

柔性压力传感器吸引了越来越多的关注，因为它们可以模仿人体皮肤以感应外部压力。然而，对于模拟人的皮肤，压力点的感测远远不够。为了实现完全仿生的皮肤，柔性传感器具有高分辨率和高灵敏度至关重要。我们进行了仿真和实验，以确定传感器灵敏度与物理参数（例如介电层的有效相对介电常数和空气比）之间的关系。根据结果，设计了微柱-聚偏二氟乙烯（PVDF）介电层，以实现高灵敏度（0.43 kPa ^–1））处于低压状态（<1 kPa）。基于微柱-PVDF（MP）膜和电极阵列（MPEA）制备了8×8像素传感器矩阵，以高分辨率（13 dpi）检测压力分布。每个像素可以通过相对电容的明显变化来反映施加压力的点。此外，可以通过柔性传感器的像素来映射具有各种几何形状的对象。将配重，塑料标记和松叶放在柔性传感器上，并成功绘制形状。特别是，约0.005 g长7 mm，宽0.6 mm的超轻松叶的映射显示了我们的柔性压力传感器的高灵敏度和高分辨率。

更新日期：2021-02-17

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