On‐Chip Generation of Structured Light Based on Metasurface Optoelectronic Integration,Laser & Photonics Reviews

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On‐Chip Generation of Structured Light Based on Metasurface Optoelectronic Integration
Laser & Photonics Reviews ( IF 9.8 ) Pub Date : 2021-02-01 , DOI: 10.1002/lpor.202000385
Qiu‐Hua Wang ₁ , Pei‐Nan Ni _{2,

3} , Yi‐Yang Xie ₁ , Qiang Kan ₄ , Pei‐Pei Chen ₅ , Pan Fu ₁ , Jun Deng ₁ , Tai‐Lai Jin ₁ , Hong‐Da Chen ₄ , Ho Wai Howard Lee _{3,

6} , Chen Xu ₁ , Patrice Genevet ₂

Affiliation

Metasurfaces offer complete control of optical wavefront at the subwavelength scale, advancing a new class of artificial planar optics, including lenses, waveplates, and holograms, with unprecedented merits over conventional optical components. In particular, the ultrathin, flat, and compact characteristics of metasurfaces facilitate their integration with semiconductor devices for the development of miniaturized and multifunctional optoelectronic systems. In this work, generation of structured light is implemented at an ultracompact wafer‐level through the monolithic integration of metasurface with standard vertical cavity surface‐emitting lasers (VCSELs). This work opens new perspectives for the design of structured light systems with compactness, lightweight, and scalability. Ultracompact beam structured laser chips with versatile functionalities are experimentally demonstrated, including multichannel beams array generation, on‐chip large‐angle beam steering up to 60°, and wafer‐level holographic beam shaping with a wide field of view (about 124°). The results will promote the development of compact light structuring systems with great potential in 3D imaging, displays, robotic vision, human–computer interaction, and augmented/virtual reality.

中文翻译：

基于超表面光电集成的结构化光的片上生成

超颖表面可在亚波长范围内完全控制光学波前，从而推动了新型人造平面光学器件（包括透镜，波片和全息图）的出现，其性能优于传统光学组件。特别地，超表面的超薄，平坦和紧凑的特性促进了它们与半导体器件的集成，以开发小型化和多功能的光电系统。在这项工作中，通过将超表面与标准垂直腔表面发射激光器（VCSEL）进行单片集成，可以在超紧凑晶片级实现结构化光的产生。这项工作为紧凑，轻巧和可扩展的结构化照明系统设计开辟了新的视角。实验证明了具有多种功能的超紧凑型光束结构激光芯片，包括多通道光束阵列生成，高达60°的片上大角度光束转向以及宽视角（约124°）的晶圆级全息光束整形。研究结果将促进紧凑型光结构系统的开发，该系统在3D成像，显示器，机器人视觉，人机交互以及增强/虚拟现实方面具有巨大潜力。

更新日期：2021-03-11

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