Membrane-Based In Situ Mid-Infrared Spectroscopic Ellipsometry: A Study on the Membrane Affinity of Polylactide-co-glycolide Nanoparticulate Systems,Analytical Chemistry

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Membrane-Based In Situ Mid-Infrared Spectroscopic Ellipsometry: A Study on the Membrane Affinity of Polylactide-co-glycolide Nanoparticulate Systems
Analytical Chemistry ( IF 6.7 ) Pub Date : 2020-12-14 , DOI: 10.1021/acs.analchem.0c03763
Alekszej Romanenko _{1,

2} , Benjamin Kalas ₁ , Petra Hermann ₁ , Orsolya Hakkel ₁ , Levente Illés ₁ , Miklós Fried _{1,

3} , Peter Fürjes ₁ , Gergö Gyulai ₄ , Peter Petrik ₁

Affiliation

Mid-infrared (IR) ellipsometry of thin films and molecule layers at solid–liquid interfaces has been a challenge because of the absorption of light in water. It has been usually overcome by using configurations utilizing illumination through the solid substrate. However, the access to the solid–liquid interface in a broad spectral range is also challenging due to the limited transparency of most structural materials in the IR wavelength range. In this work, we propose a concept of a microfabricated analysis cell based on an IR-transparent Si membrane with advantages of a robust design, flexible adaptation to existing equipment, small volume, multiple-angle capabilities, broad wavelength range, and opportunities of multilayer applications for adjusted ranges of high sensitivity. The chamber was prepared by 3D micromachining technology utilizing deep reactive ion etching of a silicon-on-insulator wafer and bonded to a polydimethylsiloxane microfluidic injection system resulting in a cell volume of approximately 50 μL. The mechanical stability of the 2 and 5 μm-thick membranes was tested using different “backbone” reinforcement structures. It was proved that the 5 μm-thick membranes are stable at lateral cell sizes of 5 mm by 20 mm. The cell provides good intensity and adjustment capabilities on the stage of a commercial mid-IR ellipsometer. The membrane configuration also provides optical access to the sensing interfaces at a broad range of incident angles, which is a significant advantage in many potential sensing structure configurations, such as plasmonic, multilayer, 2D, or metamaterial applications.

中文翻译：

基于膜的原位中红外光谱椭偏：在聚丙交酯的膜亲和研究合作-glycolide纳米颗粒体系

固液界面处的薄膜和分子层的中红外椭圆光谱法由于在水中吸收光而成为一项挑战。通常已经通过使用利用穿过固体基底的照明的构造来克服了这一点。但是，由于大多数结构材料在红外波长范围内的透明性有限，因此在宽光谱范围内进入固液界面也面临挑战。在这项工作中，我们提出了一种基于红外透明Si膜的微细分析池的概念，该池具有坚固的设计，对现有设备的灵活适应性，小体积，多角度功能，宽波长范围以及多层堆叠的机会高灵敏度调整范围的应用。该腔室是通过3D微加工技术利用绝缘体上硅晶圆的深度反应离子刻蚀制备的，并与聚二甲基硅氧烷微流体注入系统结合，从而产生了约50μL的细胞体积。使用不同的“骨架”增强结构测试了2和5μm厚膜的机械稳定性。事实证明，厚度为5μm的膜在5 mm x 20 mm的横向孔尺寸下是稳定的。该电池在商用中红外椭圆仪的舞台上具有良好的强度和调节能力。膜片配置还提供了在宽入射角范围内光学接近传感界面的功能，这在许多潜在的传感结构配置（例如等离子，多层，2D或超材料应用）中具有显着优势。

更新日期：2021-01-19

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