干凝胶的相形成动力学和溶胶-凝胶衍生的 Ba xSr1− xTiO3 薄膜的电学性质,Journal of Materials Research

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干凝胶的相形成动力学和溶胶-凝胶衍生的 Ba xSr1− xTiO3 薄膜的电学性质
Journal of Materials Research ( IF 2.7 ) Pub Date : 1997-05-01 , DOI: 10.1557/jmr.1997.0181
Soo-Ik Jang , Byung-Cheul Choi , Hyun M. Jang

使用氧化钡、氯化锶和钛醇盐（异丙醇钛）作为起始材料合成了化学均质的 Ba x Sr 1- x TiO 3 （BST，x = 0.6）多组分溶胶。乙酰丙酮 (AcAc) 作为螯合剂被引入以降低钛醇盐的快速水解速率。傅里叶变换红外光谱 (FTIR) 光谱分析表明 BST 溶胶的稳定是通过钛醇盐与 AcAc 烯醇形式的螯合实现的。与从干凝胶形成钙钛矿相相关的有效活化能通过使用不同加热速率的差热分析 (DTA) 实验估计。它约为 400 kJ/mol，Avrami 指数（反应阶数）为 n = 1，表明钙钛矿 BST 的生长受扩散控制。计算出的半衰期表明，实际加工过程中实际可达到的最低结晶温度约为 600 °C。在“Pt(150 nm)/Ti(100 nm)/SiO 2 (100 nm)/Si”衬底上制造的 BST 薄膜表现出 310 的相对介电常数，可以用由电阻元件组成的等效电路表示源自块状钙钛矿晶粒和由于晶界存在而产生的平行 RC 分量。

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Phase-formation kinetics of xerogel and electrical properties of sol-gel-derived Ba xSr1− xTiO3 thin films

Chemically homogeneous Ba x Sr 1− x TiO 3 (BST with x = 0.6) multicomponent sol was synthesized using barium oxide, strontium chloride, and Ti-alkoxide (titanium isopropoxide) as starting materials. Acetylacetone (AcAc) was introduced as a chelating agent to reduce a rapid hydrolysis rate of Ti-alkoxide. Analysis of Fourier transform infrared spectroscopy (FTIR) spectra indicated that the stabilization of BST sols was achieved by the chelation of Ti-alkoxide with the enolic form of AcAc. The effective activation energy associated with the formation of perovskite phase from the xerogel was estimated by the differential thermal analysis (DTA) experiment using various heating rates. It is approximately 400 kJ/mol with the Avrami exponent (reaction order) of n = 1, suggesting that the growth of perovskite BST is diffusion-controlled. The calculated half-life time suggests that the minimum temperature for the crystallization which is practically accessible to a real processing is approximately 600 °C. The BST thin film fabricated on the “Pt(150 nm)/Ti(100 nm)/SiO 2 (100 nm)/Si” substrate exhibited the relative dielectric permittivity of 310 and can be represented by an equivalent circuit consisting of a resistive component originated from the bulk perovskite grain and a parallel RC component resulting from the presence of the grain boundary.

更新日期：1997-05-01

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