前体坩埚的几何形状对化学气相沉积法对MoS2薄片生长的影响,New Journal of Chemistry

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前体坩埚的几何形状对化学气相沉积法对MoS2薄片生长的影响
New Journal of Chemistry ( IF 2.7 ) Pub Date : 2020-11-16 , DOI: 10.1039/d0nj05486k
Jinlei Wei _{1,

2,

3,

4,

5} , Jing-Kai Huang _{4,

5,

6} , Jianhao Du _{4,

5,

6} , Baoan Bian _{1,

2,

3} , Sean Li _{4,

5,

6} , Danyang Wang _{4,

5,

6}

Affiliation

使用具有多个温度区域的熔炉的化学气相沉积（CVD）仍然是制备高质量MoS ₂薄片的最佳方法，也是使用最广泛的方法。在这项工作中，选择MoO ₃粉末作为钼前体，以研究容纳钼前体的船形坩埚的尺寸对所得MoS ₂晶体形态的影响。已经发现，较短的或开放式的船形坩埚不利于硫的蒸气与钼前驱物之间的反应，即在这些条件下无法生成MoS ₂晶体。相比之下，使用更长的船形坩埚作为前体载体可促进三角形MoS ₂的生长晶体。此外，还发现船形坩埚的宽度对所生长的MoS ₂晶体的结构和光学性质有重大影响。原子力显微镜（AFM），拉曼光谱和光致发光（PL）的结果证实，使用较窄的舟形坩埚制备的MoS ₂晶体具有更多的单层，规则形状，均匀的表面和更好的光学性能。这项工作阐明了钼前体容器的几何形状的关键作用，并提出了一种通过CVD技术获得单层高质量MoS ₂晶体的简便而有效的方法。

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Effect of the geometry of precursor crucibles on the growth of MoS2 flakes by chemical vapor deposition

Chemical vapor deposition (CVD) employing a furnace with multiple temperature zones is still the best and most widely used method for preparing high-quality MoS₂ flakes. In this work, MoO₃ powder was chosen as the molybdenum precursor to explore the influence of the size of boat crucibles holding molybdenum precursors on the morphology of resultant MoS₂ crystals. It is found that shorter or open-ended boat crucibles are not favorable for the reaction between the vapor of sulfur and molybdenum precursors, i.e. no MoS₂ crystals can be produced under these conditions. In contrast, the use of longer boat crucibles as the precursor carrier facilitates the growth of triangular MoS₂ crystals. Furthermore, the width of the boat crucibles was also found to have a substantial impact on the structural and optical properties of the as-grown MoS₂ crystals. More monolayers, regular shapes, uniform surfaces and better optical properties were evident in MoS₂ crystals prepared using narrower boat crucibles, as confirmed by the results of the atomic force microscopy (AFM), Raman spectroscopy and photoluminescence (PL). This work clarifies the critical role of the geometry of the molybdenum precursor container and suggests a facile yet efficient way for obtaining monolayer high-quality MoS₂ crystals by the CVD technique.

更新日期：2020-11-27

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