In the present study, a procedure of the inserting of SnO2:CuO nanoparticles with different CuO nanoparticles contents within a macroporous silicon layer (macroPSi) gas sensor was prepared and successfully investigated. The macroPSi was effectively fabricated by laser assisted etching process, and CuO nanoparticles loaded with SnO2 with a high value of surface area were successfully synthesized by the spray pyrolysis method. Atomic Force Microscopy (AFM) and Field Emission Scanning Electron Microscopy (FE-SEM) manifested a novel morphology for CuO Bucky particles inside the pores and a nano nail like structure for SnO2 with a small average grain size of CuO Bucky particles with 30% content. This morphology of nanocomposites improved the sensing performance for NH3 gas. A higher sensitivity with a very swift response and recovery times of 4 s and 55 s, respectively, was obtained with 150 ppm of NH3 gas at the room temperature. This improvement in gas sensor performance is strongly related to the higher specific surface areas and smaller particle size with a higher surface roughness of SnO2 and CuO nanoparticles within the nanocomposites.

中文翻译：

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基于 SnO2：CuO/macroPSi 纳米复合材料的 NH3 气体分子的高效、快速响应和低成本传感器

在本研究中，制备并成功研究了在大孔硅层 (macroPSi) 气体传感器中插入具有不同 CuO 纳米颗粒含量的 SnO2:CuO 纳米颗粒的过程。通过激光辅助蚀刻工艺有效地制备了macroPSi，并通过喷雾热解法成功合成了负载有高表面积SnO2的CuO纳米颗粒。原子力显微镜 (AFM) 和场发射扫描电子显微镜 (FE-SEM) 显示出孔内 CuO Bucky 颗粒的新形态和 SnO2 的纳米钉状结构，其中 CuO Bucky 颗粒的平均粒径较小，含量为 30% . 纳米复合材料的这种形态提高了对 NH3 气体的传感性能。在室温下使用 150 ppm NH3 气体获得了更高的灵敏度，响应时间非常快，恢复时间分别为 4 秒和 55 秒。这种气体传感器性能的改进与纳米复合材料中更高的比表面积和更小的粒径以及更高的表面粗糙度 SnO2 和 CuO 纳米颗粒密切相关。