5-methyl-1H-benzotriazole was used as an effective corrosion inhibitor in acidic H 2 O 2 -based slurries for ultra-precision chemical mechanical polishing (CMP) of a high carbon chromium GCr15 bearing steel (AISI 52100). The CMP performance of GCr15 steel and the corresponding corrosion inhibition mechanism of 5-methyl-BTA were thoroughly investigated. The CMP results reveal that, compared with 1,2,4-triazole, 1,2,3-triazole and BTA, 5-methyl-BTA achieves the best corrosion inhibition performance, and the surface roughness R a of GCr15 steel greatly improves, which can be attributed to the triazole and hydrophobic methyl functional groups. In synergy with H 2 O 2 , 5-methyl-BTA can be both chemically and physically adsorbed on the GCr15 steel surface in acidic medium. Specifically, the chemical adsorption mainly occurs by chemical reactions between 5-methyl-BTA and iron of GCr15 steel to form a surface complex. In th...

中文翻译：

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5-甲基-1H-苯并三唑是轴承钢超精密化学机械抛光的有效缓蚀剂

5-甲基-1H-苯并三唑用作酸性H 2 O 2基浆料中的有效缓蚀剂，用于高碳铬GCr15轴承钢（AISI 52100）的超精密化学机械抛光（CMP）。深入研究了GCr15钢的CMP性能以及相应的5-甲基-BTA缓蚀机理。CMP结果表明，与1,2,4-三唑，1,2,3-三唑和BTA相比，5-甲基-BTA具有最佳的缓蚀性能，GCr15钢的表面粗糙度R a大大提高，这可以归因于三唑和疏水性甲基官能团。5-甲基-BTA与H 2 O 2协同作用，可以在酸性介质中化学和物理吸附在GCr15钢表面上。特别，化学吸附主要通过5-甲基-BTA与GCr15钢中的铁发生化学反应形成表面配合物而发生。在...