Inorganic Materials ChemistryRuhr University Bochum Universitätsstr. 150 Bochum 44801 Germany
Institute of Electrical Engineering and Plasma TechnologyRuhr University Bochum Universitätsstr. 150 Bochum 44801 Germany
Microsystems TechnologyRuhr University Bochum Universitätsstr. 150 Bochum 44801 Germany
Forschung und Entwicklung, GB Sensorikparagon GmbH & Co KGaA Schwalbenweg 29 Delbrück 33129 Germany
Department of Material Science Institute of Experimental Condensed Matter PhysicsHeinrich Heine University Düsseldorf Universitätsstr. 1 Düsseldorf 40225 Germany
RUBIONRuhr University Bochum Universitätsstr. 150 Bochum 44801 Germany
Department of Physics and Astronomy – Centre for Storage Ring Facilities (ISA)Aarhus University Aarhus 8000 Denmark
Zinc Oxide: From Precursor Chemistry to Gas Sensors: Plasma‐Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications (Small 22/2020)
In article number 1907506, Anjana Devi and co‐workers introduce a new, nonpyrophoric zinc precursor for plasma enhanced atomic layer deposition (PEALD) of zinc oxide (ZnO). Here, oxygen plasma is used to react with adsorbed zinc precursor on chemiresistor structures to form highly pure ZnO which is used effectively as a selective gas sensing layer for NO2 in a functional gas sensor device.
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