Abstract Fluorinated porous carbon nanoweb layers (FPCNWLs) are simply fabricated by spin coating of adjusting polymer mixing ratio, sequential thermal treatments, and vacuum plasma treatment to enhance the specific surface area and to dope the fluorine into the carbon lattice. The different surface tension, polarity, and molecular weight of PAN and PS causes immiscible solution, therefore, the various size of pores on the carbon structure are constructed during the stepwise thermal treatment. Moreover, the F doping ratio is easily controlled with different plasma treating time. The fluorination causes both p-type doping and affinity toward ammonia gas. The fabricated FPCNWLs-based ammonia gas sensor devices demonstrate outstanding NH3 gas sensing performances that minimum detection level (MDL) of FPCNWLs-based ammonia gas sensor is 9 ppb using FPCNWL20 and the sensors display linear range from 9 ppb to 90 ppm. In conclusion, the FPCNWL20-based ammonia gas sensor demonstrates rapid response and recovery time, excellent cyclic stability, reusability, durability, and selectivity.

中文翻译：

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用于氨气传感器应用的形状控制的多孔碳纳米网层的氟化

摘要 氟化多孔碳纳米网层（FPCNWLs）是通过调整聚合物混合比的旋涂、顺序热处理和真空等离子体处理来提高比表面积和将氟掺杂到碳晶格中而制成的。PAN 和 PS 的不同表面张力、极性和分子量导致不混溶，因此，在逐步热处理过程中，碳结构上形成了各种尺寸的孔。此外，F掺杂比例很容易通过不同的等离子体处理时间来控制。氟化导致 p 型掺杂和对氨气的亲和力。制造的基于 FPCNWLs 的氨气传感器装置展示了出色的 NH3 气体传感性能，使用 FPCNWL20 的基于 FPCNWLs 的氨气传感器的最低检测水平 (MDL) 为 9 ppb，传感器显示线性范围为 9 ppb 至 90 ppm。总之，基于 FPCNWL20 的氨气传感器表现出快速响应和恢复时间、出色的循环稳定性、可重用性、耐用性和选择性。