Shrinking conventional optical systems to chip-scale dimensions will benefit custom applications in imaging, displaying, sensing, spectroscopy, and metrology. Towards this goal, metasurfaces—planar arrays of subwavelength electromagnetic structures that collectively mimic the functionality of thicker conventional optical elements—have been exploited at frequencies ranging from the microwave range up to the visible range. Here, we demonstrate high-performance metasurface optical components that operate at ultraviolet wavelengths, including wavelengths down to the record-short deep ultraviolet range, and perform representative wavefront shaping functions, namely, high-numerical-aperture lensing, accelerating beam generation, and hologram projection. The constituent nanostructured elements of the metasurfaces are formed of hafnium oxide—a loss-less, high-refractive-index dielectric material deposited using low-temperature atomic layer deposition and patterned using high-aspect-ratio Damascene lithography. This study opens the way towards low-form factor, multifunctional ultraviolet nanophotonic platforms based on flat optical components, enabling diverse applications including lithography, imaging, spectroscopy, and quantum information processing.

将常规光学系统缩小至芯片级尺寸将有益于成像，显示，传感，光谱学和计量学中的定制应用。为了实现这一目标，已经在微波范围到可见光范围的频率范围内开发了超表面-亚波长电磁结构的平面阵列，它们共同模仿了较厚的传统光学元件的功能。在这里，我们演示了高性能的超表面光学组件，该组件在紫外波长（包括低至记录短的深紫外范围的波长）下运行，并具有代表性的波前成形功能，即高数值孔径透镜，加速光束产生和全息图投影。超颖表面的组成纳米结构元素由氧化—形成，无损，使用低温原子层沉积法沉积的高折射率介电材料，并使用高纵横比镶嵌光刻技术对其进行图案化。这项研究为基于扁平光学组件的低尺寸，多功能紫外纳米光子平台开辟了道路，并实现了包括光刻，成像，光谱学和量子信息处理在内的多种应用。