High-Resolution Laser-Induced Graphene. Flexible Electronics beyond the Visible Limit.,ACS Applied Materials & Interfaces

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High-Resolution Laser-Induced Graphene. Flexible Electronics beyond the Visible Limit.
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2020-02-20 , DOI: 10.1021/acsami.0c01377
Michael G Stanford , Cheng Zhang ₁ , Jason D Fowlkes _{1,

2} , Anna Hoffman ₁ , Ilia N Ivanov ₂ , Philip D Rack _{1,

2} , James M Tour

Affiliation

Laser-induced graphene (LIG) is a multifunctional graphene foam that is commonly direct-written with an infrared laser into a carbon-based precursor material. Here, a visible 405 nm laser is used to directly convert polyimide into LIG. This enabled the formation of LIG with a spatial resolution of ∼12 μm and a thickness of <5 μm. The spatial resolution enabled by the relatively smaller focused spot size of the 405 nm laser represents a >60% reduction in LIG feature sizes reported in prior publications. This process occurs in situ in an SEM chamber, thus allowing direct observation of LIG formation. The reduced size of the LIG features enables the direct-write formation of flexible electronics that are not visible to the unaided eye. A humidity sensor is demonstrated which could detect human breath with a response time of 250 ms. With the growing interest in LIG for flexible electronics and sensors, finer features can greatly expand its utility.

中文翻译：

高分辨率激光诱导石墨烯。超出可见极限的柔性电子。

激光诱导的石墨烯（LIG）是一种多功能的石墨烯泡沫，通常用红外激光直接写成碳基前体材料。在此，使用可见的405 nm激光将聚酰亚胺直接转换为LIG。这使得LIG的形成具有〜12μm的空间分辨率和＜5μm的厚度。405 nm激光的相对较小的聚焦光斑尺寸实现的空间分辨率代表了先前出版物中报道的LIG特征尺寸减小了> 60％。该过程在SEM室中原位发生，因此可以直接观察LIG的形成。LIG功能部件尺寸的减小使得可以直接书写形成肉眼看不到的柔性电子设备。演示了一种湿度传感器，该传感器可以以250毫秒的响应时间检测人的呼吸。

更新日期：2020-02-21

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